Metal oxide thin film, method for manufacturing the same, and solution for metal oxide thin film

Patent metadata

Field	Value
Publication number	US-10032923-B2
Application number	US-201114127562-A
Country	US
Kind code	B2
Filing date	Mar 4, 2011
Priority date	Mar 5, 2010
Publication date	Jul 24, 2018
Grant date	Jul 24, 2018

Abstract

The present disclosure provides a solution for a metal oxide semiconductor thin film, including metal hydroxides dissolved in an aqueous or nonaqueous solvent and an acid/base titrant for controlling solubility of metal hydroxides. A solution is synthesized to improve stability and semiconductive performance of a device through addition of other metal hydroxides. The solution is applied on a substrate and annealed by using various annealing apparatuses to obtain a high-quality metal oxide thin film at low temperatures. The thin film is optically transparent, and thus can be applied to thin films for various electronic devices, solar cells, various sensors, memory devices, and the like.

First claim

The invention claimed is:

1. A composition for an oxide film, the composition comprising:
a metal hydroxide; and
an acid or base titrant for controlling solubility of the metal hydroxide,
wherein the metal hydroxide comprises:
a first metal hydroxide selected from aluminum hydroxide (Al(OH) 3 ), zinc hydroxide (Zn(OH) 2 ), gallium hydroxide (Ga(OH) 3 ), iridium hydroxide (In(OH) 3 ), tin hydroxide (Sn(OH) 4 ) and a combination thereof; and
a second metal hydroxide selected from lithium hydroxide (Li(OH)), titanium hydroxide (Ti(OH)) and a combination thereof;

wherein the first to metal hydroxide has a total concentration of about 0.05 to about 10 mol/L.

2. The composition of claim 1 , wherein the metal hydroxide further comprises a third metal hydroxide selected from yttrium hydroxide (Y(OH) 3 ), zirconium hydroxide (Zr(OH) 4 ), hafnium hydroxide (Hf(OH) 4 ), scandium hydroxide (Sc(OH) 3 ), gallium hydroxide (Ga(OH) 3 ), lanthanum hydroxide (La(OH) 3 ), and a combination thereof to improve bias stability.

3. The composition of claim 2 , wherein the first metal hydroxide and the third metal hydroxide are present at a mol ratio of about 1:0 to 0.2.

4. The composition of claim 3 , wherein the first metal hydroxide and the third metal hydroxide are present at a mol ratio of about 1:0 to 0.02.

5. The composition of claim 2 , wherein the acid or base titrant is selected from ammonia, tetramethylammonium hydroxide, methylamine, urea, an acetic acid, a hydrochloric acid, a nitric acid, a sulfuric acid, hydrogen peroxide, and a combination thereof.

6. The composition of claim 2 , wherein the first metal hydroxide, the third metal hydroxide, and the second metal hydroxide are present at a mol ratio of about 1:0 to 0.2:0 to 0.2.

7. The composition of claim 6 , wherein the first metal hydroxide is zinc hydroxide (Zn(OH) 2 ).

8. The composition of claim 6 , wherein the acid or base titrant is selected from ammonia, tetramethylammonium hydroxide, methylamine, urea, an acetic acid, a hydrochloric acid, a nitric acid, a sulfuric acid, hydrogen peroxide, and a combination thereof.

9. The composition of claim 1 , wherein the acid or base titrant is selected from ammonia, tetramethylammonium hydroxide, methylamine, urea, an acetic acid, a hydrochloric acid, a nitric acid, a sulfuric acid, hydrogen peroxide, and a combination thereof.

10. The composition of claim 9 , wherein the first metal hydroxide and the second metal hydroxide are present at a mol ratio of about 1:0 to 0.2.

11. The composition of claim 10 , wherein the first metal hydroxide and the second metal hydroxide are present at a mol ratio of about 1:0 to 0.02.

12. The composition of claim 1 , wherein the metal hydroxide further comprises a third metal hydroxide selected from zirconium hydroxide (Zr(OH) 4 ), hafnium hydroxide (Hf(OH) 4 ), aluminum hydroxide (Al(OH) 3 ), yttrium hydroxide (Y(OH) 3 ), gadolinium hydroxide (Gd(OH) 3 ), lanthanum hydroxide (La(OH) 3 ), and a combination thereof.

13. The composition of claim 12 , wherein the acid or base titrant is selected from ammonia, tetramethylammonium hydroxide, methylamine, urea, an acetic acid, a hydrochloric acid, a nitric acid, a sulfuric acid, hydrogen peroxide, and a combination thereof.

14. The composition of claim 1 , wherein the first metal hydroxide is selected from zinc hydroxide (Zn(OH) 2 ), indium hydroxide (In(OH) 3 ), tin hydroxide (Sn(OH) 4 ), aluminum hydroxide (Al(OH) 3 ), and a combination thereof.

15. A method for forming an oxide film, the method comprising:
applying the composition of claim 1 on a substrate; and
annealing the substrate on which the composition is applied.

16. The method of claim 15 , wherein the annealing is performed in a vacuum or reduction atmosphere at about 100° C. to about 350° C.

17. The method of claim 15 , wherein the substrate is a flexible substrate, a transparent substrate, or a glass substrate.

18. The method of claim 15 , wherein the annealing is performed using a hot plate, a convection oven, a box furnace, or a microwave.

19. A metal oxide film formed by applying the composition of claim 1 on a substrate and performing annealing.

20. The metal oxide thin film of claim 19 , wherein the substrate is a flexible substrate, a transparent substrate, or a glass substrate.

21. The metal oxide thin film of claim 19 , wherein the metal oxide thin film is used as an active layer of a thin film transistor.

22. A composition for an oxide film, the composition comprising:
a first metal hydroxide selected from aluminum hydroxide (Al(OH) 3 ), zinc hydroxide (Zn(OH) 2 ), gallium hydroxide (Ga(OH) 3 ), indium hydroxide (In(OH) 3 ), tin hydroxide (Sn(OH) 4 ) and a combination thereof;
a second metal hydroxide selected from yttrium hydroxide (Y(OH) 3 ), zirconium hydroxide (Zr(OH) 4 ), hafnium hydroxide (Hf(OH) 4 ), scandium hydroxide (Sc(OH) 3 ), gallium hydroxide (Ga(OH) 3 ), lanthanum hydroxide (La(OH) 3 ), and a combination thereof;
a third metal hydroxide selected from lithium hydroxide (Li(OH)), titanium hydroxide (Ti(OH)), and a combination thereof; and
wherein the first to third metal hydroxide has a total concentration of about 0.05 mol/L to about 10 mol/L.

23. The composition of claim 22 , wherein the first metal hydroxide, the metal hydroxide, and the third metal hydroxide are contained at a mol ratio of about 1:0 to 0.2:0 to 0.2.

24. The composition of claim 23 , wherein the first metal hydroxide, the metal hydroxide, and the third metal hydroxide are contained at a mol ratio of about 1:0 to 0.02:0 to 0.02.

25. The composition of claim 22 , wherein the acid or base titrant is selected from ammonia, tetramethylammonium hydroxide, methylamine, urea, an acetic acid, a hydrochloric acid, a nitric acid, a sulfuric acid, hydrogen peroxide, and a combination thereof.

26. The composition of claim 25 , wherein the acid or base titrant is included in a concentration of about 0.05 mol/L to about 40 mol/L.

27. A method for forming a semiconductor device, the method comprising:
applying the composition of claim 1 on a substrate and annealing the substrate to form a semiconductor thin film;
applying the composition of claim 12 on the semiconductor thin film and annealing the semiconductor thin film to form an insulating thin film; and
applying the composition of claim 14 on the insulating thin film and annealing the insulating thin film to form a conductive thin film.

Assignees

• Moon Jooho
• Jeong Youngmin
• Jun Tae Hwan
• Song Keun Kyu
• Kim Areum
• Jung Yangho
• Univ Yonsei Iacf

Inventors

• Moon Jooho
• Jeong Youngmin
• Jun Tae Hwan
• Song Keun Kyu
• Kim Areum
• Jung Yangho

Classifications

• H10P95/90

  Thermal treatments, e.g. annealing or sintering · CPC title

• H10P14/3434

  being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title

• H10P14/3426

  Oxides · CPC title

• H10P14/2922

  being non-crystalline insulating materials, e.g. glass or polymers · CPC title

• H10P14/265

  using solutions · CPC title