Semiconductor device

Patent metadata

Field	Value
Publication number	US-10032892-B2
Application number	US-201615541936-A
Country	US
Kind code	B2
Filing date	Jan 6, 2016
Priority date	Jan 9, 2015
Publication date	Jul 24, 2018
Grant date	Jul 24, 2018

Abstract

This semiconductor device comprises an active layer that is formed of an oxide magnetic material and a porous dielectric body that contains water and is provided on the active layer. By using hydrogen ions and hydroxide ions which are formed by electrolysis of water, the crystal structure of the active layer is changed between a ferromagnetic metal and an antiferromagnetic insulating body.

First claim

The invention claimed is:

1. A semiconductor device comprising:
an active layer comprising an oxide magnetic material; and
porous dielectrics which contains water and is provided on the active layer,
wherein hydrogen ions and hydroxide ions generated by electrolysis of the water are used to change a crystal structure of the active layer between a ferromagnetic metal and an antiferromagnetic insulator.

2. A semiconductor device comprising:
a substrate;
an active layer which is provided on the substrate and comprises an oxide magnetic material;
a source electrode and a drain electrode disposed on the substrate so as to sandwich the active layer;
porous dielectrics which contains water and is provided on the active layer; and
a gate electrode provided on the porous dielectrics,
wherein a voltage is applied to the gate electrode to electrolyze the water, and
hydrogen ions and hydroxide ions generated by the electrolyzing is used to change a crystal structure of the active layer between a ferromagnetic metal and an antiferromagnetic insulator.

3. The semiconductor device according to claim 1 , wherein an oxygen content of the active layer changes between a ferromagnetic metal and an antiferromagnetic insulator.

4. The semiconductor device according to claim 1 , wherein the ferromagnetic metal comprises SrCoO 3 with a perovskite structure, and the antiferromagnetic insulator comprises SrCoO 2.5 with a brownmillerite structure.

5. The semiconductor device according to claim 1 , wherein the active layer comprises an oxide represented by ABO x , where A is Ca, Sr, or Ba; B is Co, Mn, Cr, Fe, or Ni; and 2.0≤x≤3.5.

6. The semiconductor device according to claim 1 , wherein the porous dielectrics includes at least one selected from a group consisting of 12CaO.7Al 2 O 3 , CaO, Al 2 O 3 , 12SrO.7Al 2 O 3 , Y 2 O 3 , HfO 2 , SiO 2 , MgO, NaTaO 3 , KTaO 3 , LaAlO 3 , ZrO 2 , MgAl 2 O 4 , Nb 2 O 5 , Ta 2 O 5 , Si 3 N 4 , SrTiO 3 , BaTiO 3 , CaTiO 3 , SrZrO 3 , CaZrO 3 , BaZrO 3 , and zeolite.

7. The semiconductor device according to claim 1 , wherein the porous dielectrics comprises porous dielectrics in which a hole rate is 5 to 70 vol % and in which a moisture content is 23 to 100 vol %.

8. The semiconductor device according to claim 2 , wherein an oxygen content of the active layer changes between a ferromagnetic metal and an antiferromagnetic insulator.

9. The semiconductor device according to claim 2 , wherein the ferromagnetic metal comprises SrCoO 3 with a perovskite structure, and the antiferromagnetic insulator comprises SrCoO 2.5 with a brownmillerite structure.

10. The semiconductor device according to claim 2 , wherein the active layer comprises an oxide represented by ABO x , where A is Ca, Sr, or Ba; B is Co, Mn, Cr, Fe, or Ni; and 2.0≤x≤3.5.

11. The semiconductor device according to claim 2 , wherein the porous dielectrics includes at least one selected from a group consisting of 12CaO.7Al 2 O 3 , CaO, Al 2 O 3 , 12SrO.7Al 2 O 3 , Y 2 O 3 , HfO 2 , SiO 2 , MgO, NaTaO 3 , KTaO 3 , LaAlO 3 , ZrO 2 , MgAl 2 O 4 , Nb 2 O 5 , Ta 2 O 5 , Si 3 N 4 , SrTiO 3 , BaTiO 3 , CaTiO 3 , SrZrO 3 , CaZrO 3 , BaZrO 3 , and zeolite.

12. The semiconductor device according to claim 2 , wherein the porous dielectrics comprises porous dielectrics in which a hole rate is 5 to 70 vol % and in which a moisture content is 23 to 100 vol %.

Assignees

• Univ Hokkaido Nat Univ Corp

Inventors

• Ohta Hiromichi
• Katase Takayoshi
• Suzuki Yuki

Classifications

• H01F10/1933 Primary

  Perovskites · CPC title

• H01L29/24

  Electricity · mapped topic

• H01L29/51

  Electricity · mapped topic

• H01L29/66984 Primary

  Electricity · mapped topic

• H10D64/68

  characterised by the insulator, e.g. by the gate insulator · CPC title