Semiconductor device, method for manufacturing the same, and apparatus for manufacturing semiconductor device

Patent metadata

Field	Value
Publication number	US-10032872-B2
Application number	US-201414277508-A
Country	US
Kind code	B2
Filing date	May 14, 2014
Priority date	May 17, 2013
Publication date	Jul 24, 2018
Grant date	Jul 24, 2018

Abstract

To manufacture a semiconductor device using an oxide semiconductor with high reliability and less variation in electrical characteristics, objects are to provide a method for manufacturing a semiconductor device with which an oxide semiconductor film with a fairly uniform thickness is formed, a manufacturing apparatus, and a method for manufacturing a semiconductor device with the manufacturing apparatus. In order to form an oxide semiconductor film with a fairly uniform thickness with use of a sputtering apparatus, an oxide semiconductor film the thickness uniformity of which is less than ±3%, preferably less than or equal to ±2% is formed by using a manufacturing apparatus in which a deposition chamber is set to have a reduced pressure atmosphere, preferably, to have a high degree of vacuum and power is adjusted to be applied uniformly to the entire surface of a substrate during film deposition.

First claim

What is claimed is:

1. A method for manufacturing a semiconductor device comprising the step of sputtering a material to form an oxide semiconductor layer over a substrate with use of a sputtering apparatus,
wherein the sputtering apparatus comprises:
a plurality of magnets; and
a target holder over the plurality of magnets,
wherein the plurality of magnets and a plurality of target groups over the target holder are moved from side to side during the step of sputtering,
wherein the movement from side to side of the plurality of magnets and the movement from side to side of the plurality of target groups are independent with each other,
wherein the movement from side to side of the plurality of target groups is not rotation, and
wherein a thickness uniformity of the oxide semiconductor layer is less than ±3%.

2. The method for manufacturing a semiconductor device according to claim 1 , wherein the thickness uniformity of the oxide semiconductor layer is less than or equal to ±2%.

3. The method for manufacturing a semiconductor device according to claim 1 , further comprising the steps of:
introducing the substrate into a deposition chamber of the sputtering apparatus that is vacuum evacuated and has a leakage rate lower than or equal to 1×10 −10 Pa·m 3 /sec.; and
introducing a deposition gas with a purity higher than or equal to 99.999999% to the deposition chamber,
wherein the deposition gas is used in the step of sputtering.

4. The method for manufacturing a semiconductor device according to claim 1 , wherein a substrate temperature during the step of sputtering is higher than or equal to 50° C. and lower than or equal to 450° C.

5. The method for manufacturing a semiconductor device according to claim 1 , wherein the plurality of magnets are moved from side to side during the step of sputtering at a frequency greater than or equal to 0.1 Hz and less than or equal to 1 kHz is called swing.

6. The method for manufacturing a semiconductor device according to claim 1 , wherein the movement from side to side of the plurality of magnets is not rotation.

7. An apparatus for manufacturing a semiconductor device comprising a sputtering apparatus comprising:
a supply source of a deposition gas;
a power supply;
a vacuum evacuation unit;
a substrate-heating unit;
a first swinging unit for moving a part of the sputtering apparatus from side to side,
a plurality of magnets;
a target holder over the plurality of magnets; and
a second swinging unit configured to move the target holder from side to side,
wherein the supply source, the power supply, the vacuum evacuation unit, the substrate-heating unit, and the first swinging unit are operationally connected with each other,
wherein a thickness uniformity of an oxide semiconductor layer formed with the sputtering apparatus is controlled by at least one of the first swinging unit for moving the part of the sputtering apparatus from side to side, an adjustment of the power supply, and an adjustment of a pressure in a deposition chamber of the sputtering apparatus, so that the thickness uniformity of the oxide semiconductor layer is less than ±3%,
wherein the first swinging unit is configured to move the plurality of magnets from side to side,
wherein the first swinging unit and the second swinging unit are configured to be operated independently with each other so that the plurality of magnets and the target holder are capable of moving from side to side independently with each other,
wherein the movement from side to side of the target holder is not rotation, and
wherein the movement from side to side of the plurality of magnets and the movement from side to side of the target holder are independent with each other.

8. The apparatus for manufacturing a semiconductor device according to claim 7 , further comprising a refiner between the supply source of the deposition gas and the deposition chamber.

9. The apparatus for manufacturing a semiconductor device according to claim 7 , wherein the first swinging unit is configured to move the plurality of magnets from side to side at a frequency greater than or equal to 0.1 Hz and less than or equal to 1 kHz is called swing.

10. The apparatus for manufacturing a semiconductor device according to claim 7 , wherein the movement from side to side of the plurality of magnets is not rotation.

Assignees

• Semiconductor Energy Lab

Inventors

• Yamazaki Shunpei

Classifications

• H10P72/3306

  Horizontal transfer of a single workpiece · CPC title

• H10P72/0468

  comprising a chamber adapted to a particular process · CPC title

• H10P72/0464

  characterised by the construction of the transfer chamber · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title