Tensile test piece and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-10031055-B2
Application number	US-201615238685-A
Country	US
Kind code	B2
Filing date	Aug 16, 2016
Priority date	Sep 14, 2015
Publication date	Jul 24, 2018
Grant date	Jul 24, 2018

Abstract

A method for manufacturing a tensile test piece according to one or more exemplary embodiments includes: preparing a polymer layer including a non-conductive material; forming a sacrificial layer on the polymer layer; forming a planarization layer on the sacrificial layer; shaping the polymer layer, the sacrificial layer, and the planarization layer into a dog-bone-shaped sample; etching at least a portion of the sample; and drying the sample.

First claim

What is claimed is:

1. A method for manufacturing a tensile test piece, the method comprising:
preparing a polymer layer comprising a non-conductive material;
forming a sacrificial layer on the polymer layer;
forming a planarization layer on the sacrificial layer;
shaping the polymer layer, the sacrificial layer, and the planarization layer into a dog-bone-shaped sample;
etching at least a portion of the sample; and
drying the sample.

2. The method of claim 1 , further comprising forming a copper layer on the polymer layer.

3. The method of claim 1 , wherein the forming of the sacrificial layer and the forming of the planarization layer comprises a spin coating method.

4. The method of claim 1 , wherein the shaping the polymer layer, the sacrificial layer, and the planarization layer into the sample comprises a press cutting method.

5. The method of claim 4 , wherein a length of a gauge of a middle part of the sample is greater than or equal to 4 mm and less than or equal to 6 mm.

6. The method of claim 5 , wherein a total thickness of the sample is greater than or equal to 500 nm and less than or equal to 600 nm.

7. The method of claim 1 , wherein the drying the sample comprises attaching the sample to an auxiliary guide and air-drying the sample.

8. The method of claim 1 , wherein shaping the polymer layer, the sacrificial layer, and the planarization layer into the sample comprises a reactive ion etching (RIE) process utilizing a dog-bone-shaped hard mask.

9. The method of claim 8 , wherein a length of a gauge of a middle part of the sample is greater than or equal to 1 mm and less than or equal to 2 mm.

10. The method of claim 9 , wherein a total thickness of the sample is greater than or equal to 100 nm and less than or equal to 100 μm.

11. The method of claim 1 , wherein shaping the polymer layer, the sacrificial layer, and the planarization layer into the sample comprises a reactive ion etching process after performing a photolithography process utilizing a dog-bone-shaped hard mask.

12. The method of claim 11 , wherein a length of a gauge of a middle part of the sample is greater than or equal to 250 μm and less than or equal to 300 μm.

13. The method of claim 12 , wherein a total thickness of the sample is greater than or equal to 10 nm and less than or equal to 10 μm.

Assignees

• Samsung Display Co Ltd
• Ulsan Nat Inst Science & Tech Unist
• Ulsan Nat Inst Science & Tech Unist

Inventors

• Kim Young Chan
• Park Won Sang
• Chu Hye Yong
• Hong Jong Ho
• Kim Si-Hoon
• Kim Ju-Young
• Nam Yun Seok
• Song Myoung Hoon

Classifications

• G01N3/06

  Special adaptations of indicating or recording means · CPC title

• G01N3/08 Primary

  by applying steady tensile or compressive forces (G01N3/28 takes precedence) · CPC title

• G01N2203/0298

  Manufacturing or preparing specimens · CPC title

• G01N3/62

  Manufacturing, calibrating, or repairing devices used in investigations covered by the preceding subgroups · CPC title