Micromechanical component including a diffusion stop channel

Patent metadata

Field	Value
Publication number	US-10029911-B2
Application number	US-201715401808-A
Country	US
Kind code	B2
Filing date	Jan 9, 2017
Priority date	Jan 16, 2016
Publication date	Jul 24, 2018
Grant date	Jul 24, 2018

Abstract

A method for manufacturing a micromechanical component is provided including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity, the cap together with the substrate enclosing a second cavity, a second pressure prevailing and a second gas mixture having a second chemical composition being enclosed in the second cavity. A recess situated essentially between the first cavity and the second cavity is formed for diverting at least one first particle type of the first gas mixture and/or at least one second particle type of the second gas mixture.

First claim

What is claimed is:

1. A micromechanical component, comprising:
a substrate; and
a cap connected to the substrate, the cap, together with the substrate, enclosing a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity, the cap, together with the substrate enclosing a second cavity, a second pressure prevailing and a second gas mixture having a second chemical composition being enclosed in the second cavity, the substrate or the cap including a sealed access opening;
wherein the micromechanical component includes a recess situated between the first cavity and the second cavity for diverting at least one of: i) at least one first particle type of the first gas mixture, and ii) at least one second particle type of the second gas mixture,
wherein the recess is situated at least partially in a bond layer, which is situated between the substrate and the cap, wherein the recess is formed as a slit-shaped break in the bond connection.

2. The micromechanical component as recited in claim 1 , wherein the recess is situated at least partially in a layer, which is situated between the substrate and the cap.

3. The micromechanical component as recited in claims 2 , wherein the recess is situated at least partially in an additional layer, which is situated between the substrate and the cap.

4. The micromechanical component as recited in claims 1 , wherein the recess is situated at least partially in at least one of the substrate and the cap.

Assignees

• Bosch Gmbh Robert

Inventors

• Breitling Achim
• Reichenbach Frank
• Reinmuth Jochen
• Amthor Julia

Classifications

• B81B2207/056

  of static structures · CPC title

• B81B7/0041 Primary

  maintaining a controlled atmosphere with techniques not provided for in B81B7/0038 · CPC title

• G01P15/00

  Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration · CPC title

• B81B2207/09

  Packages · CPC title

• B81C1/00293 Primary

  maintaining a controlled atmosphere with processes not provided for in B81C1/00285 · CPC title