Integrated semiconductor optical element and manufacturing method for same

Patent metadata

Field	Value
Publication number	US-10027088-B2
Application number	US-201715617104-A
Country	US
Kind code	B2
Filing date	Jun 8, 2017
Priority date	May 23, 2013
Publication date	Jul 17, 2018
Grant date	Jul 17, 2018

Abstract

The present invention relates to an optical semiconductor integrated element and manufacturing method for same solves difficulty in element manufacture, and reduces optical transmission loss. The present invention is provided with a stripe-shaped waveguide configured from a multilayer structure wherein at least a first conductivity-type lower cladding layer, a waveguide core layer, and an upper cladding layer are layered, and the upper cladding layer is formed using a second conductivity-type upper cladding layer, and an i-type upper cladding layer, which has a bent portion by being shifted in the perpendicular direction with respect to the main extending direction of the waveguide.

First claim

What is claimed is:

1. A manufacturing method for an integrated semiconductor optical circuit apparatus, characterized by comprising:
depositing at least a first conductivity type lower clad layer, a waveguide core layer and a second conductivity type upper clad layer that are of the conductivity type opposite to the first conductivity type in this order on a semiconductor substrate;
forming a first insulating film mask in linear stripe form on the upper side of the second conductivity type upper clad layer;
selectively removing the exposed portions of the second conductivity type upper clad layer using the first insulating film mask as an etching mask;
regrowing an i type upper clad layer in the portions from which the second conductivity type upper clad layer has been removed using the first insulating film mask as a selective growth mask;
forming after the removal of the first insulating film mask a second insulating film mask having a pattern of stripes in the direction in which the stripes of the first insulating film mask run, including at least two portions formed on the regions corresponding to the second conductivity type upper clad layer portions, a portion formed on the region corresponding to the i type upper clad layer portion, and bending portions for connecting the portions formed on the regions corresponding to the second conductivity type upper clad layer portions to the portion formed on the region corresponding to the i type upper clad layer portion; and
forming a waveguide by carrying out etching using the second insulating film mask as an etching mask until at least a part of the first conductivity type lower clad layer is removed.

2. The manufacturing method for an integrated semiconductor optical circuit apparatus according to claim 1 , characterized in that the width of the stripes in the first insulating film mask is the same as or greater than the width of the stripes of the waveguide and is no greater than 20 μm.

3. The manufacturing method for an integrated semiconductor optical circuit apparatus according to claim 1 , characterized in that the stripes of the second insulating film mask are bent on all the regions that correspond to the i type upper clad layer portions.

4. The manufacturing method for an integrated semiconductor optical circuit apparatus according to claim 1 , characterized by further comprising, embedding the waveguide in a dielectric oxide film and in an organic insulator after the formation of the waveguide.

5. The manufacturing method for an integrated semiconductor optical circuit apparatus according to claim 1 , characterized by further comprising, regrowing a semi-insulating semiconductor layer using the second insulating film mask as a selective growth mask after the formation of the waveguide.

Assignees

• Fujitsu Ltd

Inventors

• Takabayashi Kazumasa
• Yamamoto Tsuyoshi

Classifications

• H01S5/2213

  based on polyimide or resin · CPC title

• H01S5/0265

  Intensity modulators (intra-cavity modulators H01S5/0625) · CPC title

• H01S5/101

  Curved waveguide (H01S5/1243 takes precedence) · CPC title

• H01S5/2275

  mesa created by etching · CPC title

• G02F1/025

  in an optical waveguide structure (G02F1/017, {G02F1/2257} take precedence) · CPC title