Optoelectronic component having a resonator

Patent metadata

Field	Value
Publication number	US-10025030-B2
Application number	US-201615565135-A
Country	US
Kind code	B2
Filing date	Apr 12, 2016
Priority date	Apr 16, 2015
Publication date	Jul 17, 2018
Grant date	Jul 17, 2018

Abstract

An optoelectronic component including an optical waveguide, an integrated optical resonator, in which the waveguide or at least a portion of the waveguide is arranged, and a heat source which can increase the temperature of the resonator during operation. A web region adjoins laterally the waveguide when viewed in the longitudinal direction of the waveguide. The web region forms a jacket portion of the waveguide and has a smaller thickness than the waveguide. The heat source is thermally connected to the waveguide by means of the web region.

First claim

The invention claimed is:

1. An optoelectronic component ( 1 ) having
an optical waveguide ( 30 ),
an integrated optical resonator ( 60 ), in which the waveguide ( 30 ) or at least a portion of the waveguide ( 30 ) is arranged, and
a heat source ( 2 ) which during operation can raise the temperature of the resonator ( 60 ),
characterized in that,
viewed in longitudinal direction of the waveguide ( 30 ), a web region ( 40 ) laterally adjoins the waveguide ( 30 ), the web region forming a jacket portion of the waveguide ( 30 ) and having a smaller thickness than the waveguide ( 30 ), and
the heat source ( 2 ) is thermally connected to the waveguide ( 30 ) by means of this web region ( 40 ).

2. The optoelectronic component ( 1 ) as claimed in claim 1 , characterized in that
the electric conductor region ( 10 , 11 ) comprises a doped region in a semiconductor layer or a salicide layer ( 15 a , 15 b ) on a semiconductor layer, and
this semiconductor layer in the resonator ( 60 ) forms the waveguiding layer of the waveguide ( 30 ) or one of the waveguiding layers of the waveguide ( 30 ) as well as the layer of the web region ( 40 ) or one of the layers of the web region ( 40 ).

3. The optoelectronic component ( 1 ) as claimed in claim 2 , characterized in that
the waveguide ( 30 ), at least in a portion within the resonator ( 60 ), is a ridge waveguide, which comprises a waveguiding ridge and, viewed in longitudinal direction of the waveguide ( 30 ), comprises a web region ( 40 ) both to the left and right of the ridge, which web region forms a jacket portion of the ridge waveguide and has a smaller layer thickness than the ridge, and
the web regions ( 40 ) and the waveguiding ridge are formed by the same semiconductor layer.

4. The optoelectronic component ( 1 ) as claimed in claim 2 , characterized in that the web regions ( 40 ) and the waveguiding ridge are formed by the same silicon layer.

5. The optoelectronic component ( 1 ) as claimed in claim 1 , characterized in that the web region ( 40 ) and the waveguide ( 30 ) consist of the same material.

6. The optoelectronic component ( 1 ) as claimed in claim 1 , characterized in that the waveguide ( 30 ), at least in a portion within the resonator ( 60 ), is a ridge waveguide, which comprises a waveguiding ridge and, viewed in longitudinal direction of the waveguide ( 30 ), comprises a web region ( 40 ) both to the left and right of the ridge, which web region forms a jacket portion of the ridge waveguide and has a smaller layer thickness than the ridge.

7. The optoelectronic component ( 1 ) as claimed in claim 6 , characterized in that
a heat source ( 2 ), viewed in longitudinal direction of the waveguide ( 30 ), is arranged to the left of the ridge waveguide and is thermally connected to the waveguide ( 30 ) by means of the left web region ( 40 ), and
a heat source ( 2 ), viewed in longitudinal direction of the waveguide ( 30 ), is arranged to the right of the ridge waveguide and is thermally connected to the waveguide ( 30 ) by means of the right web region ( 40 ).

8. The optoelectronic component ( 1 ) as claimed in claim 1 , characterized in that the web region ( 40 ) comprises at least two web portions, namely
a directly heatable web portion, on which the heat source ( 2 ) lies or which has the heat source ( 2 ) integrated in it, and
a heat-conducting web portion, which itself does not have a heat source, is arranged between the heat source ( 2 ) and the waveguide ( 30 ) and conducts the heat of the heat source ( 2 ) from the directly heatable web portion in the direction of the waveguide ( 30 ).

9. The optoelectronic component ( 1 ) as claimed in claim 1 , characterized in that the heat source ( 2 ) comprises an electric conductor region ( 10 , 11 ), which extends along the waveguide ( 30 ) and can be heated by the current flow.

10. The optoelectronic component ( 1 ) as claimed in claim 9 , characterized in that the electric conductor region ( 10 , 11 ) comprises a doped region in a semiconductor layer, which in the resonator ( 60 ) forms the waveguiding layer of the waveguide ( 30 ) or one of the waveguiding layers of the waveguide ( 30 ) and/or the layer of the web region ( 40 ) or one of the layers of the web region ( 40 ).

11. The optoelectronic component ( 1 ) as claimed in claim 9 , characterized in that the electric conductor region ( 10 , 11 ) comprises a salicide layer ( 15 a , 15 b ) on a semiconductor layer, which in the resonator ( 60 ) forms the waveguiding layer of the waveguide ( 30 ) or one of the waveguiding layers of the waveguide ( 30 ) and/or the layer of the web region ( 40 ) or one of the layers of the web region ( 40 ).

12. The optoelectronic component ( 1 ) as claimed in claim 9 , characterized in that
the optoelectronic component ( 1 ) comprises a covering layer, which totally covers the waveguide ( 30 ) and the web region ( 40 ) or at least sections thereof, and
the covering layer comprises a slit-shaped through-hole ( 23 ) which, in its hole longitudinal direction, extends along the waveguide ( 30 ) and is filled with an electrically conductive material, and
the electric conductor region ( 10 , 11 ) of the heat source ( 2 ) at least also comprises the slit-shaped through-hole ( 23 ) filled with the electrically conductive material.

13. The optoelectronic component ( 1 ) as claimed in claim 9 , characterized in that the cross-section of the electric conductor region ( 10 , 11 ) varies in longitudinal direction of the waveguide ( 30 ).

14. The optoelectronic component ( 1 ) as claimed in claim 1 , characterized in that
the heat source ( 2 ), viewed in longitudinal direction of the waveguide ( 30 ), lies laterally directly adjacent to the resonator ( 60 ), and
the heat source ( 2 ) is thermally connected by means of the web region ( 40 ) to a waveguide portion, which forms a waveguiding component of the integrated optical resonator ( 60 ).

15. The optoelectronic component ( 1 ) as claimed in claim 1 , characterized in that the heat source ( 2 ) is thermally connected by means of the web region ( 40 ) to a waveguide portion, which, viewed in longitudinal direction of the waveguide ( 30 ), lies in front of or behind the resonator ( 60 ).

16. The optoelectronic component ( 1 ) as claimed in claim 9 , characterized in that the component ( 1 ) comprises a working point adjustment device, which comprises the heat source ( 2 ), a detection unit for detecting a measured variable indicating the respective working point of the component ( 1 ) and a control unit, which controls the heat source ( 2 ) as a function of the measured variable of the detection unit, in particular adjusts the current through the electric conductor region ( 10 , 11 ) of the heat source ( 2 ).

17. The optoelectronic component ( 1 ) as claimed in claim 16 , characterized in that
the detection unit detects the optical output signal of the component ( 1 ), and
the control unit is designed such that it controls the heat source ( 2 ) as a function of the optical output signal, in particular the amplitude or wavelength of the optical output signal.
signal.

18. The optoelectronic component ( 1 ) as claimed in claim 1 , characterized in that the resonator ( 60 ) is a Fabry-Pérot resonator ( 60 ), a ring resonator or a micro disk resonator ( 60 ).

Assignees

• Univ Berlin Tech
• Univ Berlin Tech

Inventors

• Meister Stefan
• Rhee Hanjo
• Theiss Christoph
• Al-Saadi Aws
• Henniges Marvin
• Atif Muhammad

Classifications

• G02B6/12007 Primary

  forming wavelength selective elements, e.g. multiplexer, demultiplexer · CPC title

• G02F1/3138 Primary

  the optical waveguides being made of semiconducting materials · CPC title

• G02B6/29398

  Temperature insensitivity · CPC title

• G02B6/29395

  configurable, e.g. tunable or reconfigurable (switching G02B6/35) · CPC title

• G02F1/3132

  of directional coupler type · CPC title