MEMS device and electronic device having projector function

Patent metadata

Field	Value
Publication number	US-10018833-B2
Application number	US-201314372367-A
Country	US
Kind code	B2
Filing date	Jan 8, 2013
Priority date	Feb 3, 2012
Publication date	Jul 10, 2018
Grant date	Jul 10, 2018

Abstract

In a MEMS device ( 1 ), a first drive portion ( 40 ) is divided into a first drive section ( 41 ) and a second drive section ( 42 ). A second drive portion ( 50 ) is divided into a third drive section ( 51 ) and a fourth drive section ( 52 ). The first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline an optical component ( 10 ).

First claim

The invention claimed is:

1. A MEMS device comprising:
an optical component; and
only a pair of drive portions provided to hold the optical component therebetween including a first drive portion extending in a first direction a second drive portion extending in the first direction and a first connecting portion that connects the first drive portion to the second drive portion and is arranged along a second direction substantially orthogonal to the first direction, wherein
a drive element of the first drive portion consists of a first drive element which is a single-layered drive element and which drives only the first drive portion, and a drive section of the first drive portion consists of a rectangular first drive section, a rectangular second drive section arranged in series with the first drive section in the first direction, and an intermediate section formed between the first drive section and the second drive section,
a drive element of the second drive portion consists of a second drive element which is a single-layered drive element and which drives only the second drive portion, and a drive section of the second drive portion consists of a rectangular third drive section, a rectangular fourth drive section arranged in series with the third drive section in the first direction, and an intermediate section formed between the third drive section and the fourth drive section, and
the first, the second, the third, and the fourth drive sections of only the pair of drive portions are controlled for driving independently of each other to incline the optical component in a biaxial direction about a first rotation axis line and a second rotation axis line extending in the first direction and the second direction substantially orthogonal to each other in a same plane, respectively.

2. The MEMS device according to claim 1 , wherein
the first drive section and the second drive section are controlled for driving substantially in a same manner and the third drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the first rotation axis line.

3. The MEMS device according to claim 1 , wherein
the first drive section and the third drive section are controlled for driving substantially in a same manner and the second drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the second rotation axis line.

4. The MEMS device according to claim 1 , wherein
the first drive section and the second drive section are controlled for driving substantially in a same manner and the third drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the first rotation axis line,
the first drive section and the third drive section are controlled for driving substantially in a same manner and the second drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the second rotation axis line, and
in the first drive section, the second drive section, the third drive section, and the fourth drive section, drive control about the first rotation axis line and drive control about the second rotation axis line are combined to incline the optical component in the biaxial direction about the first rotation axis line and the second rotation axis line.

5. The MEMS device according to claim 1 , wherein
the first drive portion is divided into the first drive section and the second drive section in a vicinity of a central portion of the first drive portion in the first direction, and
the second drive portion is divided into the third drive section and the fourth drive section in a vicinity of a central portion of the second drive portion in the first direction.

6. The MEMS device according to claim 5 , wherein
the first drive section and the second drive section of the first drive portion are formed to have a substantially same length in the first direction, and
the third drive section and the fourth drive section of the second drive portion are formed to have a substantially same length in the first direction.

7. The MEMS device according to claim 1 , wherein
the first drive section and the second drive section of the first drive portion are formed in a state where the first drive section and the second drive section are separated from each other by a first distance in the first direction,
the third drive section and the fourth drive section of the second drive portion are formed in a state where the third drive section and the fourth drive section are separated from each other by a second distance in the first direction, and
the first distance and the second distance are smaller than a width of the first drive portion in the second direction and a width of the second drive portion in the second direction, respectively.

8. The MEMS device according to claim 1 , wherein
a pair of the first drive portions and a pair of the second drive portions are provided to hold the optical component therebetween, and
the pair of first drive portions and the pair of the second drive portions are formed to be substantially point-symmetric to each other, using a substantially central portion of the optical component as a symmetry center.

9. The MEMS device according to claim 8 , wherein
the pair of first drive portions substantially point-symmetric to each other are controlled for driving in a different manner, and
the pair of second drive portions substantially point-symmetric to each other are controlled for driving in a different manner.

10. The MEMS device according to claim 1 , further comprising:
a plurality of drive units that include a first drive unit including the first drive portion, the second drive portion, and the first connecting portion, and a second drive unit arranged adjacent to the first drive unit along the second direction, including a third drive portion extending in the first direction, a fourth drive portion extending in the first direction, and a second connecting portion that is arranged along the second direction and connects the third portion to the fourth drive portion; and
a third connecting portion that connects the first drive unit to be the second drive unit, wherein
a drive section of the third drive portion consists of a rectangular fifth drive section, a rectangular sixth drive section arranged in series with the fifth drive section in the first direction, and an intermediate section formed between the fifth drive section and the sixth drive section,
a drive section of the fourth device portion consists of a rectangular seventh drive section, a rectangular eighth drive section arranged in series with the seventh drive section in the first direction, and an intermediate section formed between the seventh drive section and the eighth drive section, and
the plurality of drive units, in which the fourth drive section of the first drive unit and the fifth drive section of the second drive unit are connected by the third connection portion, are formed to meander.

11. The MEMS device according to claim 1 , wherein
the first drive section, the second drive section, the third drive section, and the fourth drive section are driven by deformation of a piezoelectric body resulting from voltage application to the piezoelectric body and have a first drive electrode, a second drive electrode, a third drive electrode, and a fourth drive electrode, respectively, and
the first drive section, the second drive section, the third drive section, and the fourth drive section are control

Assignees

• Funai Electric Co

Inventors

• Murayama Manabu
• Kugo Kouichi
• Inoue Naoki
• Fujii Hitoshi

Classifications

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• G02B26/0841

  the reflecting element being moved or deformed by electrostatic means · CPC title

• B81B3/0062

  Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension · CPC title