Self-powered tactile pressure sensors

Patent metadata

Field	Value
Publication number	US-10018525-B2
Application number	US-201415032435-A
Country	US
Kind code	B2
Filing date	Oct 30, 2014
Priority date	Nov 1, 2013
Publication date	Jul 10, 2018
Grant date	Jul 10, 2018

Abstract

In one embodiment, a self-powered tactile pressure sensor includes a flexible substrate, an array of piezoelectric crystalline nanorods each having a bottom end and a top end, the nanorods being generally perpendicular to the substrate, a top electrode that is electrically coupled to the top ends of the nanorods, and a bottom electrode that is electrically coupled to the bottom ends of the nanorods.

First claim

The invention claimed is:

1. A self-powered tactile pressure sensor comprising:
a flexible polymer substrate;
a flexible polymer intermediate layer provided on top of the substrate;
a flexible polymer superstrate provided on top of the intermediate layer, the superstrate having a planar outer surface adapted to contact objects within an environment in which the pressure sensor is used;
an ordered array of piezoelectric crystalline nanorods embedded within the flexible polymer of the intermediate layer, the nanorods being generally parallel to each other and generally perpendicular to the substrate and the superstrate, each nanorod having a bottom end positioned near the substrate and a top end positioned near the superstrate;
a top electrode positioned at a junction of the intermediate layer and the superstrate, the top electrode being electrically coupled to the top ends of the nanorods;
an electrically conductive pressure distribution plate positioned between the top electrode and the top ends of the nanorods, the distribution plate being configured to distribute forces imposed upon the superstrate across the array; and
a bottom electrode positioned at a junction between the intermediate layer and the substrate, the bottom electrode being electrically coupled to the bottom ends of the nanorods.

2. The sensor of claim 1 , wherein each of the substrate, intermediate layer, and the superstrate are made of polyimide.

3. The sensor of claim 1 , wherein the nanorods are made of zinc oxide.

4. The sensor of claim 1 , wherein a c-plane of each nanorod is generally parallel to the substrate and the superstrate.

5. The sensor of claim 1 , wherein the nanorods are approximately 10 to 500 nanometers in diameter.

6. The sensor of claim 5 , wherein the nanorods are approximately 100 to 20,000 nanometers long.

7. The sensor of claim 6 , wherein the nanorods have a pitch of approximately 20 to 2,000 nanometers.

8. The sensor of claim 1 , wherein the pressure distribution plate is made of a metal oxide.

9. The sensor of claim 8 , wherein the pressure distribution plate is made of aluminum oxide.

10. The sensor of claim 1 , further comprising a first passage formed through the substrate that provides access to the bottom electrode.

11. The sensor of claim 10 , further comprising a second passage formed through the substrate and the intermediate layer that provides access to the top electrode.

12. A method for fabricating a self-powered tactile pressure sensor, the method comprising:
forming a first layer of flexible material that defines an external surface of the pressure sensor;
forming a thin metal layer on the first layer of flexible material, the metal layer being configured to distribute forces imposed upon the first layer of flexible material;
forming a first electrode on the thin metal layer;
forming a seed layer on the first electrode;
coating the seed layer with a thermoplastic polymer;
patterning the thermoplastic polymer so as to have a periodic array of openings;
growing an array of piezoelectric crystalline nanorods on portions of the seed layer exposed through the openings in the template, the nanorods being generally parallel to each other and generally perpendicular to the first layer of flexible material, wherein first ends of the nanorods are electrically coupled to the first electrode;
removing the thermoplastic polymer;
forming a second layer of flexible material that embeds the nanorods in the flexible material so as to fill spaces between the nanorods with the flexible material;
forming a second electrode on the second layer of flexible material, wherein second ends of the nanorods are electrically coupled to the second electrode; and
forming a third layer of flexible material on the second layer of flexible material.

13. The method of claim 12 , wherein patterning the thermoplastic polymer comprises patterning the polymer using thermal nanoimprint lithography.

14. The method of claim 12 , wherein growing an array of piezoelectric crystalline nanorods comprises growing the nanorods using low-temperature hydrothermal growth.

15. The method of claim 14 , wherein the low-temperature hydrothermal growth is performed at a temperature below 300° C.

16. The method of claim 14 , wherein the low-temperature hydrothermal growth is performed at approximately 85° C.

17. The method of claim 12 , wherein patterning the thermoplastic polymer comprises patterning the thermoplastic polymer to have a periodic array of 200 nanometer diameter, 500 nanometer pitch circular openings arranged in an orthogonal array.

Assignees

• Univ Texas

Inventors

• Celik-Butler Zeynep
• Butler Donald P

Classifications

• G01L9/008

  using piezoelectric devices (piezoelectric resonators G01L9/0022; surface acoustic waves G01L9/0025) · CPC title

• H01L41/1132

  Electricity · mapped topic

• G01L9/0055 Primary

  bonded on a diaphragm · CPC title

• H01L41/37

  Electricity · mapped topic

• G01L1/16

  using properties of piezoelectric devices · CPC title