Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
US-2015377624-A1 · Dec 31, 2015 · US
US10018468B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10018468-B2 |
| Application number | US-201414911253-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 23, 2014 |
| Priority date | Nov 14, 2013 |
| Publication date | Jul 10, 2018 |
| Grant date | Jul 10, 2018 |
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A physical-quantity sensor is configured to be used with a physical-quantity sensor element that outputs a sensor signal in response to a physical quantity. A physical-quantity detection circuit of the physical-quantity sensor includes a signal generating unit for generating a detecting signal and a multiplier that multiplies the sensor signal by the detecting signal. The signal generating unit converts a first phase of a predetermined signal having a frequency corresponding to a frequency of the sensor signal, into a second phase, and calculates an amplitude value corresponding to the second phase as to generate the detecting signal. This physical-quantity sensor improves accuracy of phase adjustment without increasing a sampling frequency.
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The invention claimed is: 1. A physical-quantity detection circuit to be used with a physical-quantity sensor element that outputs a sensor signal in response to a physical quantity, the physical-quantity detection circuit comprising: a signal generating unit for generating a detecting signal; an analog-digital conversion circuit for converting the sensor signal into a digital sensor signal; a multiplier for multiplying the digital sensor signal by the detecting signal, and an unnecessary-signal cancelling section provided between the analog-digital conversion circuit and the multiplier; wherein the signal generating unit is configured to: generate a predetermined signal having a frequency corresponding to a frequency of the sensor signal; generate a cancelling signal based on the predetermined signal; and generate the detecting signal based on the predetermined signal, wherein the digital sensor signal contains an unnecessary signal, and wherein the unnecessary-signal cancelling section adds the cancelling signal to the digital sensor signal for reducing the unnecessary signal. 2. The physical-quantity detection circuit according to claim 1 , wherein the physical-quantity sensor element outputs the sensor signal in response to the physical quantity while vibrating, and wherein the predetermined signal is an oscillating signal according to a vibration of the sensor element. 3. The physical-quantity detection circuit according to claim 1 , wherein the signal generating unit converts a first phase of the predetermined signal into a second phase by calculation. 4. The physical-quantity detection circuit according to claim 1 , wherein the signal generating unit includes a correction-amount generator and a sinewave generating unit, wherein the correction-amount generator includes a temperature sensor that obtains temperature data, and a memory section that stores a correction amount corresponding to the temperature data, and wherein the sinewave generating unit converts a first phase of the predetermined signal into a second phase based on the correction amount. 5. The physical-quantity detection circuit according to claim 1 , wherein the physical quantity is an angular velocity.
Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719 · CPC title
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by vibratory elements · CPC title
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