Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US10017660B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10017660-B2 |
| Application number | US-201113701034-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 31, 2011 |
| Priority date | Jun 2, 2010 |
| Publication date | Jul 10, 2018 |
| Grant date | Jul 10, 2018 |
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There is provided a resin composition that exhibits excellent heat resistance, heat conductivity, and water absorption. The resin composition comprises a cyanate ester resin (A) represented by formula (I), an epoxy resin (B), and an inorganic filler (C), the content of the inorganic filler (C) being 301 to 700 parts by weight based on 100 parts by weight in total of the cyanate ester resin (A) and the epoxy resin (B) wherein Rs each independently represent a hydrogen atom or a methyl group; and n is an integer of 1 to 50.
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The invention claimed is: 1. A resin composition comprising: a cyanate ester resin (A) represented by formula (I); an epoxy resin (B); an inorganic filler (C), and a maleimide compound (D); the content of the cyanate ester resin (A) being 30 to 70 parts by weight based on 100 parts by weight in total of the cyanate ester resin (A) and the epoxy resin (B), the content of the epoxy resin (B) being 30 to 70 parts by weight based on 100 parts by weight in total of the cyanate ester resin (A) and the epoxy resin (B), the content of the inorganic filler (C) being 562.5 to 700 parts by weight based on 100 parts by weight in total of the cyanate ester resin (A) and the epoxy resin (B), the content of the maleimide compound (D) being 10 to 70 parts by weight based on 100 parts by weight in total of the cyanate ester resin (A) and the maleimide compound (D), wherein each R independently represents a hydrogen atom; and n is an integer of 1 to 5, wherein the epoxy resin (B) comprises a biphenylaralkyl epoxy resin the inorganic filler (C) comprises aluminum oxide, and the maleimide compound (D) comprises bis(3-ethyl-5-methyl-4-maleimidephenyl) methane. 2. A prepreg comprising: a base material; and a resin composition according to claim 1 impregnated into or coated on the base material. 3. A laminated sheet comprising a cured product of the prepreg according to claim 2 . 4. A metal foil-clad laminated sheet comprising a laminated and cured product of the prepreg according to claim 2 and a metal foil.
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Compositions of macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain (C08L7/00 - C08L57/00, C08L61/00 take precedence); Compositions of derivatives of such polymers · CPC title
Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors · CPC title
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