Annealing for damage free laser processing for high efficiency solar cells
US-9214585-B2 · Dec 15, 2015 · US
US10014420B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10014420-B2 |
| Application number | US-201615220394-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 27, 2016 |
| Priority date | Jan 29, 2014 |
| Publication date | Jul 3, 2018 |
| Grant date | Jul 3, 2018 |
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A solar cell includes: a semiconductor substrate having a light-receiving surface and a back surface; a first-conductivity-type first semiconductor layer on the back surface; a second-conductivity-type second semiconductor layer on the back surface; a first electrode electrically connected to the first semiconductor layer; a second electrode electrically connected to the second semiconductor layer; and an insulating layer in a boundary region between a first-conductivity-type region of the first semiconductor layer and a second-conductivity-type region of the second semiconductor layer. The insulating layer has an inclined side surface adjacent the second-conductivity-type region inclined such that the thickness of the insulating layer decreases with decreasing distance from the second-conductivity-type region. The width of the inclined surface in a direction perpendicular to the thickness direction of the insulating layer and toward the second-conductivity-type region is 10 to 300 times the thickness of the insulating layer in a region excluding the inclined surface.
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The invention claimed is: 1. A solar cell, comprising: a semiconductor substrate of one of a first conductivity type and a second conductivity type having a light receiving surface and a back surface; a first semiconductor layer of the first conductivity type on the back surface; a second semiconductor layer of the second conductivity type on the back surface; a first electrode electrically connected to the first semiconductor layer; a second electrode electrically connected to the second semiconductor layer; and an insulating layer in a boundary region between a first conductivity type region of the first semiconductor layer and a second conductivity type region of the second semiconductor layer, wherein a side of the insulating layer adjacent the second conductivity type region has an inclined surface inclined such that a thickness of the insulating layer decreases with decreasing distance from the second conductivity type region, and a width of the inclined surface in a direction perpendicular to a thickness direction of the insulating layer and toward the second conductivity type region is 10 to 300 times a thickness of the insulating layer in a region excluding the inclined surface, in the boundary region, the first semiconductor layer is in a direct contact with the back surface of the semiconductor substrate and the insulating layer is between the first semiconductor layer and the second semiconductor layer in a direction orthogonal to the back surface of the semiconductor substrate, the first electrode comprises: a first transparent electrode layer; and a first collection electrode layer on the first transparent electrode layer, the second electrode comprises: a second transparent electrode layer; and a second collection electrode layer on the second transparent electrode layer, and the second semiconductor layer and the second transparent electrode layer are stacked on the inclined surface of the insulating layer, according to an order of: the insulating layer, the second semiconductor layer, and the second transparent electrode layer, each of the second semiconductor layer and the second transparent electrode layer extending parallel to the inclined surface of the insulating layer. 2. The solar cell according to claim 1 , wherein in the boundary region, the second transparent electrode layer is on the second semiconductor layer in the direction orthogonal to the back surface of the semiconductor substrate. 3. The solar cell according to claim 1 , wherein in a region in which the inclined surface is formed, the insulating layer is between the first semiconductor layer and the second semiconductor layer in the direction orthogonal to the back surface of the semiconductor substrate. 4. The solar cell according to claim 1 , wherein a side surface of the insulating layer adjacent the first conductivity type region is perpendicular to the back surface of the semiconductor substrate.
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