Distance measurement device, distance measurement method, and distance measurement program
US-2024191984-A1 · Jun 13, 2024 · US
US10012495B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10012495-B2 |
| Application number | US-201515516254-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 8, 2015 |
| Priority date | Oct 3, 2014 |
| Publication date | Jul 3, 2018 |
| Grant date | Jul 3, 2018 |
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According to one aspect, the invention relates to a device ( 100, 200, 300, 400, 500 ) for measuring the distance, with respect to a reference plane (P REF ), from a point of light (P i ) of an object (O). The device comprises a two-dimensional detector ( 30 ) comprising a detection plane (P DET ) and an imaging system ( 10 ) adapted to form an image of a light spot (P i ) situated on an object of interest plane ( 11 ) in an image plane ( 11 ′) arranged in the vicinity of the detection plane (P DET ) or a conjugate plane (P′ DET ) of the detection plane. The device further comprises a separator element ( 20 ) for forming, from a beam emitted by a point of light of the object of interest plane ( 11 ), and emerging from the imaging system ( 10 ) at least two coherent beams, having a spatial superposition region in which the beams interfere and a signal processing means ( 50 ) for determining, from the interference pattern formed on the detection plane, and resulting from the optical interferences between said coherent beams, the distance from the point of light to a conjugate plane of the detection plane in the object space of the imaging system ( 10 ), said conjugate plane of the detection plane forming the reference plane (P REF ).
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The invention claimed is: 1. A device for measuring the distance from a point of light of an object relative to a reference plane, comprising: a two-dimensional detector comprising a detection plane; an imaging system adapted to form an image from a point of light located on an object-of-interest plane in an image plane situated close to the detection plane or a conjugate plane of the detection plane; a separator element configured to form, from a beam emitted by a light point from the object-of-interest plane and emerging from the imaging system, at least two beams being coherent with each other, having a spatial superposition region in which the beams interfere; and signal processing means configured to determine, from the interference pattern formed on the detection plane and resulting from the optical interferences between said coherent beams, the distance from the point of light to a conjugate plane of the detection plane in the space that is the object of the imaging system, said conjugate plane of the detection plane forming the reference plane. 2. The device according to claim 1 , wherein a period of the fringes of the interference pattern formed is smaller than the resolution of the imaging system. 3. The device according to claim 1 , wherein the separator element comprises a diffraction grating close to the imaging plane. 4. The device according to claim 3 , wherein the diffraction grating is a two-dimensional diffraction grating. 5. The device according to claim 3 , wherein the diffraction grating is a transmission or reflection grating, which does not transmit, nor reflect, the zero-order. 6. The device according to claim 1 , further comprising a relay optic configured to form a conjugate plane of the detection plane in the image space of the imaging system. 7. The device according to claim 1 , applied to three-dimensional microscopic imaging, wherein the imaging system includes a microscope objective. 8. The device according to claim 1 , applied to passive telemetry, wherein the imaging system includes a photo or video lens adapted to work to infinity. 9. A method for measuring a distance, with respect to a reference plane, from a point of light of an object of interest, comprising: the formation of an image from the point of light located on an image plane located near a detection plane of a two-dimensional detector or of a conjugate plane of the detection plane; the formation, by a separator element, from a beam emitted by the point of light and emerging from the imaging system, of at least two beams that are coherent with each another and having a spatial superposition region in which the coherent beams interfere; and the determination, from the interference pattern formed on the detection plane and resulting from the optical interferences between said coherent beams, of the distance from the point of light to a conjugate plane of the detection plane in the space that is the object of the imaging system, said conjugate plane of the detection plane forming the reference plane. 10. The method according to claim 9 , in which the distance from the point of light to the reference plane is obtained from the measurement of a period of the fringes of the interference pattern.
arrangements using fluorescence or luminescence · CPC title
based on optical coherence, e.g. phase-contrast arrangements, interference arrangements · CPC title
Grating as beam-splitter · CPC title
Measuring microscopes · CPC title
Details of detection or image processing, including general computer control · CPC title
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