Piezoelectric film, production method thereof, piezoelectric element, and liquid discharge apparatus

Patent metadata

Field	Value
Publication number	US-10011111-B2
Application number	US-201715439564-A
Country	US
Kind code	B2
Filing date	Feb 22, 2017
Priority date	Aug 29, 2014
Publication date	Jul 3, 2018
Grant date	Jul 3, 2018

Abstract

A piezoelectric film of the present invention is a piezoelectric film including a perovskite oxide represented by the following formula (P), in which crystal phases of the perovskite oxide include tetragonal crystals and rhombohedral crystals at a ratio that satisfies the following formula (1).

A 1+δ [(Zr x Ti 1−x ) 1−a Nb a ]O y   (P)

0.70≤rhombohedral crystals/(rhombohedral crystals+tetragonal crystals)≤0.95   (1),
where, in the formula (P), A is an A-site element primarily containing Pb, and Zr, Ti, and Nb are B-site elements. x is equal to or higher than 0.4 and lower than 1, excluding x of equal to or higher than 0.51 and equal to or lower than 0.53. a is equal to or higher than 0.08.

First claim

What is claimed is:

1. A piezoelectric film comprising: a perovskite oxide represented by the following formula (P),
wherein crystal phases of the perovskite oxide include tetragonal crystals and rhombohedral crystals at a ratio that satisfies the following formula (1),
A 1+δ [(Zr x Ti 1−x ) 1−a Nb a ]O y   (P)

0.70≤rhombohedral crystals/(rhombohedral crystals+tetragonal crystals)≤0.95   (1),

where, in the formula (P), A is an A-site element primarily containing Pb, and Zr, Ti, and Nb are B-site elements, x is equal to or higher than 0.4 and lower than 1, excluding x of equal to or higher than 0.51 and equal to or lower than 0.53, a is equal to or higher than 0.08, and δ=0 and y=3 are standard in which δ and y may deviate from standard values in a range in which a perovskite structure is capable of being obtained.

2. The piezoelectric film according to claim 1 ,
wherein x is higher than 0.5.

3. The piezoelectric film according to claim 1 ,
wherein the piezoelectric film is a columnar crystal film consisting of a number of columnar crystals.

4. A piezoelectric element comprising:
the piezoelectric film according to claim 1 ; and
an electrode which applies an electric field to the piezoelectric film.

5. A liquid discharge apparatus comprising:
the piezoelectric element according to claim 4 ; and
a liquid discharge member which is provided integrally with or separately from the piezoelectric element,
wherein the liquid discharge member has a liquid storage chamber which stores a liquid, and a liquid discharge port through which the liquid is discharged from the liquid storage chamber to the outside.

Assignees

• Fujifilm Corp

Inventors

• Murakami Naoki
• Arakawa Takami
• Fujii Takamichi

Classifications

• B41J2/1646

  thin film formation by sputtering · CPC title

• C23C14/3471

  Introduction of auxiliary energy into the plasma · CPC title

• H01L41/047

  Electricity · mapped topic

• C23C14/00

  Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material · CPC title

• C23C14/08

  Oxides (C23C14/10 takes precedence) · CPC title