Graphene-based touch sensor device using triboelectricity and method for fabricating the device

Patent metadata

Field	Value
Publication number	US-10006819-B2
Application number	US-201715587004-A
Country	US
Kind code	B2
Filing date	May 4, 2017
Priority date	May 9, 2016
Publication date	Jun 26, 2018
Grant date	Jun 26, 2018

Abstract

The present disclosure provides a graphene-based touch sensor device using triboelectric effect, the device comprising: a substrate; a first electrode layer disposed on the substrate; a graphene channel layer disposed on the substrate, wherein the graphene channel layer is flush with the first electrode layer, and is spaced from the first electrode layer; a gate dielectric layer in partial contact with the electrode layer and the graphene channel layer respectively; source and drain electrodes formed on both opposing ends of the graphene channel layer respectively; and a triboelectric layer formed on the first electrode layer, wherein the triboelectric layer generates a triboelectric potential via contact of an external friction material therewith, wherein the contact of the external friction material is detected based on a current change in the graphene channel layer due to the triboelectric potential applied thereto.

First claim

The invention claimed is:

1. A graphene-based touch sensor device using triboelectric effect comprising:
a substrate;
a graphene channel layer disposed on the substrate;
a gate dielectric layer;
a source and drain electrodes; and
a triboelectric layer,
wherein the triboelectric layer generates a triboelectric potential via contact of an external friction material therewith,
wherein the contact of the external friction material is detected based on a current change in the graphene channel layer due to the triboelectric potential applied thereto.

2. The device of claim 1 comprising:
a substrate;
a first electrode layer disposed on the substrate;
a graphene channel layer disposed on the substrate, wherein the graphene channel layer is
flush with the first electrode layer, and is spaced from the first electrode layer;
a gate dielectric layer in partial contact with the electrode layer and the graphene channel layer respectively;
source and drain electrodes formed on both opposing ends of the graphene channel layer respectively; and
a triboelectric layer formed on the first electrode layer,
wherein the triboelectric layer generates a triboelectric potential via contact of an external friction material therewith,
wherein the contact of the external friction material is detected based on a current change in the graphene channel layer due to the triboelectric potential applied thereto.

3. The device of claim 2 , wherein the substrate is a flexible substrate.

4. The device of claim 2 , wherein the gate dielectric layer induces a gate characteristic for the graphene channel layer.

5. The device of claim 2 , wherein the gate dielectric layer includes a two-dimensional insulating material or an ion-gel.

6. The device of claim 2 , wherein the triboelectric layer is made of a material located in a center region of a triboelectric series.

7. The device of claim 1 comprising:
a substrate;
a graphene channel layer disposed on the substrate;
a gate dielectric layer disposed on the graphene channel layer;
source and drain electrodes disposed on the graphene channel layer on both opposing ends of the graphene channel layer respectively, wherein the source and drain electrodes are separated from the gate dielectric layer;
a further electrode layer disposed on the gate dielectric layer; and
a triboelectric layer disposed on the further electrode layer,
wherein the triboelectric layer generates a triboelectric potential via contact of an external friction material therewith,
wherein the contact of the external friction material is detected based on a current change in the graphene channel layer due to the triboelectric potential applied thereto.

8. The device of claim 7 , wherein the substrate is a flexible substrate.

9. The device of claim 7 , wherein the gate dielectric layer induces a gate characteristic for the graphene channel layer.

10. The device of claim 7 , wherein the gate dielectric layer includes a two-dimensional insulating material or an ion-gel.

11. The device of claim 7 , wherein the triboelectric layer is made of a material located in a center region of a triboelectric series.

12. A method for manufacturing a graphene-based touch sensor device using triboelectric effect comprising:
providing a substrate;
transferring graphene onto the substrate to form a graphene layer;
forming source and drain electrodes partially on the graphene layer;
etching the graphene layer;
forming a gate dielectric layer on an electrode layer; and
attaching a triboelectric layer on the electrode layer.

13. The method of claim 12 comprising:
providing a substrate;
depositing a first electrode layer on the substrate;
patterning the first electrode layer using a first photolithography process;
transferring graphene onto the substrate to form a graphene layer such that the graphene layer is separated from the first electrode layer;
forming source and drain electrodes partially on the graphene layer using a second photolithography process;
etching the graphene layer using a third photolithography process to form a graphene channel layer;
forming a gate dielectric layer so as to be partially in contact with the first electrode layer and the graphene channel layer respectively; and
attaching a triboelectric layer on the first electrode layer.

14. The method of claim 13 , wherein the first photolithography process is a positive photolithography process.

15. The method of claim 13 , wherein the second photolithography process is a negative photolithography process.

16. The method of claim 13 , wherein the third photolithography process is a positive photolithography process.

17. The method of claim 12 comprising:
providing a substrate;
transferring graphene onto the substrate to form a graphene layer;
forming source and drain electrodes partially on the graphene layer using a first photolithography process;
etching the graphene layer using a second photolithography process to form a graphene channel layer;
forming a gate dielectric layer on the graphene channel layer;
depositing a further electrode layer on the gate dielectric layer;
patterning the further electrode layer using a third photolithography process; and
attaching a triboelectric layer on the patterned further electrode layer.

18. The method of claim 17 , wherein the third photolithography process is a positive photolithography process.

19. The method of claim 17 , wherein the first photolithography process is a negative photolithography process.

20. The method of claim 17 , wherein the second photolithography process is a positive photolithography process.

Assignees

• Research & Business Found Sungkyunkwan Univ

Inventors

• Kim Sang Woo
• Kim Tae Ho
• Khan Usman
• Ryu Han Jun
• Choi Seung
• KANG Minki
• Kim Dong Hoon
• Seung Wan Chul

Classifications

• G01L1/005 Primary

  by electrical means and not provided for in G01L1/06 - G01L1/22 · CPC title

• H01L29/66742

  Electricity · mapped topic

• H01L29/78684

  Electricity · mapped topic

• H01L29/51

  Electricity · mapped topic

• H01L29/1606

  Electricity · mapped topic