Method and system for on-line real-time measuring the surface topography and out-of plane deformation by using phase-shifting shadow moiré method

Patent metadata

Field	Value
Publication number	US-10006761-B2
Application number	US-201314065650-A
Country	US
Kind code	B2
Filing date	Oct 29, 2013
Priority date	Jul 25, 2013
Publication date	Jun 26, 2018
Grant date	Jun 26, 2018

Abstract

The present invention is directed to a system and method for on-line real-time measuring the surface topography and out-of-plane deformation by using phase-shifting shadow moiré method. Digital Phase-Shifting Shadow Moiré Method is applied to a system, which receives the reflected images from the surface of transparent or non-transparent plate projected under a light beam passing through a grating. Next, by image correction program, the skewed interference fringe pattern is recovered to the image as if the image acquisition equipment is placed normal to the surface. Furthermore, the received images are processed with Phase-Shifting to show the surface topography of the plate.

First claim

What is claimed is:

1. A method for on-line real-time measuring the surface topography and out-of-plane deformation of a substrate by using a phase-shifting shadow moiré method, comprising:
providing a substrate having a test plane, wherein the substrate is a transparent substrate not having to first be prepared with reflective paint sprayed thereon or with other surface processing techniques, and wherein the substrate is fixed to a substrate holder at one side thereof and does not rest on any plane or platform, wherein the substrate holder is adjustable such that a distance between the substrate and a reference grating may be changed;
positioning a reference grating fixed to a reference grating holder above the substrate with a distance, wherein the reference grating is made of glass and is parallel with the substrate and configured to project a light beam through a pattern to the test plane;
projecting a light beam to the reference grating by a light source positioned in a light linear guide, wherein a plurality of incident angles to the normal of the reference grating is formed by linear movement of the light source in the light linear guide, such that a plurality of fringe pattern images are received at an other side of the normal of the reference grating, wherein a fringe pattern image with the best contrast is selected to attain a selective incident angle, and wherein the light beam passes through the reference grating onto the test plane and is reflected to pass through the reference grating again as a reflected light beam to form the plurality of fringe pattern images;
capturing the plurality of fringe pattern images by an image acquisition apparatus positioned in an acquisition linear guide, wherein a plurality of reflective angles is formed, wherein the image acquisition apparatus moves linearly in the acquisition linear guide, and wherein a fringe pattern image with the best contrast is selected to attain a proper reflective angle;
performing image correction to recover normalized fringe pattern images from each of the plurality of fringe pattern images by correcting for skew;
changing a distance between the substrate and the reference grating by adjusting the substrate to receive the plurality of fringe pattern images for a phase value of the test plane; and
calculating the phase value to out-of-plane displacement to rebuild a surface topography of the substrate.

2. A system for on-line real-time measuring the surface topography and out-of-plane deformation of a substrate by using a phase-shifting shadow moiré method, comprising:
a reference grating fixed to a reference grating holder, disposed above the substrate at a distance, wherein the reference grating is made of glass and is parallel with the substrate and configured to project a light beam through a pattern to a test plane of the substrate;
a light source positioned in a light linear guide, projecting a light beam to the reference grating, wherein a plurality of incident angles to the normal of the reference grating is formed by linear movement of the light source in the light linear guide, such that a plurality of fringe pattern images are received at an other side of the normal of the reference grating, wherein a fringe pattern image with the best contrast is selected to attain a selective incident angle, and wherein the light beam passes through the reference grating onto the test plane and is reflected to pass through the reference grating again as a reflected light beam to form the plurality of fringe pattern images;
an image acquisition apparatus positioned in an acquisition linear guide, disposed above the reference grating and the substrate, capturing the plurality of fringe pattern images, wherein a plurality of reflective angles is formed, wherein the image acquisition apparatus moves linearly in the acquisition linear guide, and wherein a fringe pattern image with the best contrast is selected to attain a proper reflective angle; and
a computer, electrically coupled to the image acquisition apparatus to receive the plurality of fringe pattern images, having a program module, determining a selective incident angle having a fringe pattern image with the best contrast, and determining a proper reflective angle having a fringe pattern image with the best contrast, and having an image correction program module, recovering normalized fringe pattern image from each of the plurality of fringe pattern images by correcting for skew, and having the program module reading and processing the plurality of fringe pattern images with phase-shift to measure a surface topography of the substrate,
wherein the substrate is fixed to a substrate holder at one side thereof and does not rest on any plane or platform, wherein the substrate holder is adjustable such that a distance between the substrate and a reference grating may be changed, and wherein the substrate is a transparent substrate not having to first be prepared with reflective paint sprayed thereon or with other surface processing techniques.

Assignees

• Univ Nat Tsing Hua

Inventors

• Wang Wei-Chung
• Kang wen-yi
• Chang Ya-Hsin
• Hsu Hsuan-Hao

Classifications

• G01B11/254 Primary

  Projection of a pattern, viewing through a pattern, e.g. moiré · CPC title