Vacuum pump

Patent metadata

Field	Value
Publication number	US-10006492-B2
Application number	US-201715425199-A
Country	US
Kind code	B2
Filing date	Feb 6, 2017
Priority date	Feb 9, 2016
Publication date	Jun 26, 2018
Grant date	Jun 26, 2018

Abstract

A vacuum pump comprises: a bearing device; and an exhaust function including a rotary body supported by the bearing device and configured to exhaust gas. The bearing device includes a bearing having an outer ring, an inner ring, and a rolling body, a lubricant storage configured to store lubricant, a lubricant supply structure configured to supply, to the bearing, the lubricant stored in the lubricant storage, a holding member configured to hold the bearing, and a porous body disposed outside the outer ring of the bearing and filled with the lubricant supplied from the lubricant supply structure to the bearing.

First claim

What is claimed is:

1. A vacuum pump comprising:
a bearing device; and
an exhaust function including a rotary body supported by the bearing device and configured to exhaust gas,
wherein the bearing device includes
a bearing having an outer ring, an inner ring, and a rolling body,
a lubricant storage configured to store lubricant,
a lubricant supply structure configured to supply, to the bearing, the lubricant stored in the lubricant storage,
a holding member configured to hold the bearing, and
a porous body disposed outside the outer ring of the bearing and filled with the lubricant supplied from the lubricant supply structure to the bearing.

2. The vacuum pump according to claim 1 , wherein
the porous body includes at least one of
a first portion disposed outside the outer ring of the bearing in an axial direction thereof, or
a second portion disposed outside the outer ring in a radial direction thereof.

3. The vacuum pump according to claim 1 , wherein
the porous body includes an interconnected pore, and
a heat transfer path continuously formed from an inner surface to an outer surface of the porous body is formed by the lubricant filling the interconnected pore.

4. The vacuum pump according to claim 1 , wherein
the porous body is made of a material having a higher coefficient of thermal conductivity than that of the outer ring of the bearing.

5. The vacuum pump according to claim 1 , further comprising:
one or more dampers provided between the outer ring of the bearing and the holding member,
wherein a stiffness of a structure including the porous body, the bearing, and the damper is 100 to 1000 N/mm in the axial direction and 50 to 500 N/mm in the radial direction.

6. The vacuum pump according to claim 1 , wherein
the porous body includes a porous coating provided on at least one of at least part of an outer surface of the outer ring of the bearing or at least part of a surface of the holding member facing the outer ring of the bearing.

7. The vacuum pump according to claim 1 , wherein
a plurality of oil discharge paths are formed at the outer ring of the bearing.

8. The vacuum pump according to claim 1 , wherein
the porous body is made of sintered metal.

9. The vacuum pump according to claim 3 , wherein
the porous body is made of polyurethane, and
the porous body is made in such a manner that the density of interconnected pore type urethane foam formed with 50 to 100 pores/in is increased to several times by hot pressing, and then, the resultant is processed into a predetermined shape.

Assignees

• Shimadzu Corp

Inventors

• Manabe Masashi

Classifications

• F04D29/063

  specially adapted for elastic fluid pumps · CPC title

• F04D29/059 Primary

  Roller bearings · CPC title

• F16C2360/45

  Turbo-molecular pumps · CPC title

• F16C33/6648 Primary

  in a porous or resinous body, e.g. a cage impregnated with the liquid · CPC title

• F16C33/6685

  Details of collecting or draining, e.g. returning the liquid to a sump · CPC title