Semiconductor devices and structures and methods of formation

Patent metadata

Field	Value
Publication number	US-10002935-B2
Application number	US-201615167765-A
Country	US
Kind code	B2
Filing date	May 27, 2016
Priority date	Aug 23, 2011
Publication date	Jun 19, 2018
Grant date	Jun 19, 2018

Abstract

A semiconductor device structure is disclosed. The semiconductor device structure includes a mesa extending above a substrate. The mesa has a channel region between a first side and second side of the mesa. A first gate is on a first side of the mesa, the first gate comprising a first gate insulator and a first gate conductor comprising graphene overlying the first gate insulator. The gate conductor may comprise graphene in one or more monolayers. Also disclosed are a method for fabricating the semiconductor device structure; an array of vertical transistor devices, including semiconductor devices having the structure disclosed; and a method for fabricating the array of vertical transistor devices.

First claim

What is claimed is:

1. A semiconductor device structure, comprising:
a mesa extending vertically from a substrate, the mesa comprising an indium gallium zinc oxide (IGZO) channel material;
an insulator material on a vertical sidewall of the mesa, the insulator material spanning an entirety of a height and a width of the vertical sidewall of the mesa; and
a conductor material to a horizontal thickness of only one atom adjacent the insulator material, the conductor material spanning an entirety of a height and a width of a vertical sidewall of the insulator material.

2. The semiconductor device structure of claim 1 , wherein the conductor material is directly adjacent the insulator material.

3. The semiconductor device structure of claim 1 , further comprising another insulator material on another vertical sidewall of the mesa, the another insulator material spanning an entirety of a height and a width of the another vertical sidewall of the mesa.

4. The semiconductor device structure of claim 3 , further comprising an additional amount of the conductor material to a horizontal thickness of only one atom adjacent the another insulator material, the additional amount of the conductor material spanning an entirety of a height and a width of a vertical sidewall of the another insulator material.

5. The semiconductor device structure of claim 1 , wherein the insulator material defines a greater horizontal thickness than the horizontal thickness of the conductor material.

6. The semiconductor device structure of claim 1 , further comprising a metal seed directly adjacent the conductor material.

7. A semiconductor device, comprising:
an array of semiconductor device structures, at least one semiconductor device structure of the array comprising:
a column of segments of an indium gallium zinc oxide (IGZO) channel material and segments of an insulator material, the segments of the IGZO channel material vertically extending from a substrate, neighboring segments of the IGZO channel material spaced from one another by a segment of the insulator material;
a planar gate insulator extending along the column of the segments of the IGZO channel material and the segments of the insulator material; and
a single monolayer of a conductor material extending along a vertical sidewall of the planar gate insulator.

8. The semiconductor device of claim 7 , wherein the IGZO channel material consists of the IGZO.

9. The semiconductor device of claim 7 , wherein sidewalls of the segments of the IGZO channel material are coplanar with sidewalls of the segments of the insulator material.

10. The semiconductor device of claim 7 , further comprising:
another planar gate insulator extending along the column of the segments of the IGZO channel material and the segments of the insulator material, the column interposed between the planar gate insulator and the another planar gate insulator; and
another single monolayer of the conductor material extending along a vertical sidewall of the another planar gate insulator.

11. The semiconductor device of claim 7 , wherein the segments of the insulator material extend directly from the substrate beneath the column.

12. A semiconductor device, comprising:
an array of semiconductor device structures, at least one semiconductor device structure of the array comprising:
a column of segments of an indium gallium zinc oxide (IGZO) channel material and segments of an insulator material, the segments of the IGZO channel material vertically extending from a substrate, neighboring segments of the IGZO channel material spaced from one another by a segment of the insulator material,
a planar gate insulator extending along the column of the segments of the IGZO channel material and the segments of the insulator material; and
a single monolayer of a conductor material extending along a vertical sidewall of the planar gate insulator and defining a height equal to a height of the planar gate insulator.

13. A semiconductor device, comprising:
an array of semiconductor device structures, at least one semiconductor device structure of the array comprising:
a column of segments of an indium gallium zinc oxide (IGZO) channel material and segments of an insulator material, the segments of the IGZO channel material vertically extending from a substrate, neighboring segments of the IGZO channel material spaced from one another by a segment of the insulator material, and a bottom surface of the segments of the insulator material elevated relative to a bottom surface of the segments of the IGZO channel material;
a planar gate insulator extending along the column of the segments of the IGZO channel material and the segments of the insulator material; and
a single monolayer of a conductor material extending along a vertical sidewall of the planar gate insulator.

Assignees

• Micron Technology Inc

Inventors

• Sandhu Gurtej S

Classifications

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• H01L29/78648

  Electricity · mapped topic

• H01L27/1225

  Electricity · mapped topic

• H01L27/1052

  Electricity · mapped topic

• H01L29/24

  Electricity · mapped topic