Semiconductor device and electronic device

Patent metadata

Field	Value
Publication number	US-10002888-B2
Application number	US-201715665701-A
Country	US
Kind code	B2
Filing date	Aug 1, 2017
Priority date	Dec 11, 2009
Publication date	Jun 19, 2018
Grant date	Jun 19, 2018

Abstract

An object is to improve the drive capability of a semiconductor device. The semiconductor device includes a first transistor and a second transistor. A first terminal of the first transistor is electrically connected to a first wiring. A second terminal of the first transistor is electrically connected to a second wiring. A gate of the second transistor is electrically connected to a third wiring. A first terminal of the second transistor is electrically connected to the third wiring. A second terminal of the second transistor is electrically connected to a gate of the first transistor. A channel region is formed using an oxide semiconductor layer in each of the first transistor and the second transistor. The off-state current of each of the first transistor and the second transistor per channel width of 1 μm is 1 aA or less.

First claim

The invention claimed is:

1. A semiconductor device comprising:
a first transistor; and
a second transistor,
wherein one of a source and a drain of the second transistor is electrically connected to a gate of the first transistor,
wherein the first transistor comprises a gate electrode layer, a gate insulating layer over the gate electrode layer, a first oxide semiconductor layer over the gate insulating layer and a second oxide semiconductor layer over the first oxide semiconductor layer,
wherein each of the first oxide semiconductor layer and the second oxide semiconductor layer comprises In, Ga and Zn, and
wherein the second oxide semiconductor layer comprises a c-axis aligned crystal.

2. The semiconductor device according to claim 1 ,
wherein one of a source and a drain of the first transistor is electrically connected to a clock signal line.

3. The semiconductor device according to claim 1 ,
wherein sum of thickness of the first oxide semiconductor layer and the second oxide semiconductor layer is 3 nm to 50 nm.

4. A semiconductor device comprising:
a first transistor;
a second transistor;
a third transistor; and
a fourth transistor,
wherein the first transistor comprises a gate electrode layer, a gate insulating layer over the gate electrode layer, a first oxide semiconductor layer over the gate insulating layer, a second oxide semiconductor layer over the first oxide semiconductor layer, a source electrode layer over the second oxide semiconductor layer and a drain electrode layer over the second oxide semiconductor layer,
wherein a first insulating layer is over the source electrode layer, the drain electrode layer and the second oxide semiconductor layer,
wherein a second insulating layer is over the first insulating layer,
wherein each of the first oxide semiconductor layer and the second oxide semiconductor layer comprises In, Ga and Zn,
wherein the second oxide semiconductor layer comprises a c-axis aligned crystal,
wherein the first insulating layer comprises oxygen and silicon,
wherein the second insulating layer comprises nitrogen and silicon,
wherein one of a source and a drain of the first transistor is electrically connected to a first wiring,
wherein the other of the source and the drain of the first transistor is electrically connected to a second wiring,
wherein one of a source and a drain of the second transistor is electrically connected to a third wiring,
wherein the other of the source and the drain of the second transistor is electrically connected to the second wiring,
wherein a gate of the second transistor is electrically connected to a fourth wiring,
wherein one of a source and a drain of the third transistor is electrically connected to a gate of the first transistor,
wherein one of a source and a drain of the fourth transistor is electrically connected to the third wiring,
wherein the other of the source and the drain of the fourth transistor is electrically connected to the gate of the first transistor, and
wherein a gate of the fourth transistor is electrically connected to the fourth wiring.

5. The semiconductor device according to claim 4 ,
wherein the other of the source and the drain of the third transistor is electrically connected to a fifth wiring, and
wherein a gate of the third transistor is electrically connected to the fifth wiring.

6. The semiconductor device according to claim 4 ,
wherein the other of the source and the drain of the third transistor is electrically connected to a fifth wiring, and
wherein a gate of the third transistor is electrically connected to a sixth wiring.

7. The semiconductor device according to claim 4 ,
wherein a channel width of the first transistor is larger than a channel width of the second transistor,
wherein the channel width of the first transistor is larger than a channel width of the third transistor, and
wherein the channel width of the second transistor is larger than a channel width of the fourth transistor.

8. A semiconductor device comprising:
a first transistor; and
a second transistor,
wherein the first transistor comprises a gate electrode layer, a gate insulating layer over the gate electrode layer, a first oxide semiconductor layer over the gate insulating layer, a second oxide semiconductor layer over the first oxide semiconductor layer, a source electrode layer over the second oxide semiconductor layer and a drain electrode layer over the second oxide semiconductor layer,
wherein a first insulating layer is over the source electrode layer, the drain electrode layer and the second oxide semiconductor layer,
wherein a second insulating layer is over the first insulating layer,
wherein each of the first oxide semiconductor layer and the second oxide semiconductor layer comprises In, Ga and Zn,
wherein the second oxide semiconductor layer comprises a c-axis aligned crystal,
wherein the first insulating layer comprises oxygen and silicon,
wherein the second insulating layer comprises nitrogen and silicon, and
wherein a gate of the first transistor is electrically connected to one of a source and a drain of the second transistor.

9. The semiconductor device according to claim 8 ,
wherein one of a source and a drain of the first transistor is electrically connected to a first wiring,
wherein the other of the source and the drain of the first transistor is electrically connected to the first wiring,
wherein the other of the source and the drain of the second transistor is electrically connected to a third wiring, and
wherein a gate of the second transistor is electrically connected to the third wiring.

10. The semiconductor device according to claim 8 ,
wherein one of a source and a drain of the first transistor is electrically connected to a first wiring,
wherein the other of the source and the drain of the first transistor is electrically connected to the first wiring,
wherein the other of the source and the drain of the second transistor is electrically connected to a third wiring, and
wherein a gate of the second transistor is electrically connected to a fourth wiring.

Assignees

• Semiconductor Energy Lab

Inventors

• Kimura Hajime
• Umezaki Atsushi
• Yamazaki Shunpei

Classifications

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