Semiconductor structures having low resistance paths throughout a wafer
US-2015332925-A1 · Nov 19, 2015 · US
US10002769B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10002769-B2 |
| Application number | US-201214349853-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 5, 2012 |
| Priority date | Oct 6, 2011 |
| Publication date | Jun 19, 2018 |
| Grant date | Jun 19, 2018 |
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The invention relates to a method for functionalizing an electrically conductive substrate, which is not a substrate made of gold, via a layer of chemical compounds, said method comprising the following steps: a step in which the electrically conductive substrate is placed in contact with chemical compounds comprising at least a disulfide terminal group; a step in which the disulfide terminal group of said chemical compounds is electro-oxidized, causing said chemical compounds to form a layer at the surface of the electrically conductive substrate.
Opening claim text (preview).
The invention claimed is: 1. A method for functionalizing an electrically conductive substrate via a layer comprising a chemical compound, the substrate being a substrate made of a material selected from the group consisting of carbon, platinum, an indium-tin oxide and nickel, comprising: contacting the electrically conductive substrate with a chemical compound comprising at least a disulfide terminal group, said chemical compound satisfies formula (I): wherein: X is a charge storage group, which is a polyazacycloalkane group complexed with at least a metal element, said polyazacycloalkane group being a tetrazacycloalkane group selected from the group consisting of formula (II), formula (III) and formula (IV): wherein: R 1 , R 2 , R 3 and R 4 represent, independently of each other, an alkyl, aryl, alkylaryl group, a halogen atom, an (alkyl)metallocene group, wherein the alkyl, aryl, alkylaryl, (alkyl)metallocene group may be perfluorinated; M is a metal element having at least two degrees of oxidation; braces indicating the spot through which said tetraazacycloalkane group is bound to the disulfide group via a spacer group; L is a single bond or an organic spacer group; Z is a cyclic disulfide group; and n is a whole number ranging from 1 to 6; and electro-oxidizing the cyclic disulfide terminal group of said chemical compounds, causing said chemical compounds to form a layer at the surface of the electrically conductive substrate. 2. The method of claim 1 , wherein the tetraazacycloalkane group is of formula (II). 3. The method of claim 1 , wherein the tetraazacycloalkane group satisfies one of formula (V) and formula (VI): wherein: M is a metal element having at least two degrees of oxidation; and T represents a ferrocene group. 4. The method of claim 1 , wherein the metal element is a transition metal element. 5. The method of claim 4 , wherein the transition metal element is selected from the group consisting of Cr, Mn, Fe, Co, Ni, and Cu. 6. The method of claim 1 , wherein the metal element is copper. 7. The method of claim 1 , wherein said charge storage group and said disulfide terminal group are separated by an organic spacer group which is a hydrocarbon group, being in the form of a linear or branched chain, in which one or more bonding groups can be inserted. 8. The method of claim 7 , wherein the hydrocarbon group is an alkylene group, in which one or more bonding groups can be inserted. 9. The method of claim 7 , wherein the one or more bonding groups are selected from the group consisting of a —(C═O)— group, a —(C═O)O group, a —SO 2 group, and an amide group. 10. The method of claim 1 , wherein said charge storage group and said disulfide terminal group are separated by an organic spacer group satisfying the following fomula (VII): —(CH 2 ) 4 —NH—CO—(CH 2 ) 4 — (VII). 11. The method of claim 1 , wherein the disulfide group is a group of following formula (VIII): 12. The method of claim 1 , wherein the chemical compounds satisfy one of formula (IX) and formula (X): wherein T represents a ferrocene group. 13. The method of claim 1 , wherein the tetraazacycloalkane group is of formula (III). 14. The method of claim 1 , wherein the tetraazacycloalkane group is of formula (IV).
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