Three-port piezoelectric ultrasonic transducer

Patent metadata

Field	Value
Publication number	US-10001552-B2
Application number	US-201514883583-A
Country	US
Kind code	B2
Filing date	Oct 14, 2015
Priority date	Oct 15, 2014
Publication date	Jun 19, 2018
Grant date	Jun 19, 2018

Abstract

A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry. The first electrode may be disposed in a first portion of the diaphragm, and the second electrode may be disposed in a second, separate, portion of the diaphragm. Each of the first and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping.

First claim

What is claimed is:

1. A method comprising:
transmitting, during a first time period, responsive to signals from transceiver circuitry, first ultrasonic signals by way of a first electrode of a piezoelectric micromechanical ultrasonic transducer (PMUT), the PMUT including a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, the first electrode and a second electrode, each of the first electrode and the second electrode being electrically coupled with the transceiver circuitry; and
receiving, during a second time period, second ultrasonic signals by way of the second electrode, wherein
the first time period and the second time period are at least partially overlapping.

2. The method of claim 1 , wherein the PMUT is configured to simultaneously transmit first ultrasonic signals by way of the first electrode and to receive second ultrasonic signals by way of the second electrode.

3. The method of claim 1 , wherein:
each of the first electrode and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity; and
the first electrode is disposed in an inner portion of the diaphragm and the second electrode is disposed in an outer portion of the diaphragm, the outer portion being proximal to a wall of the cavity and between the wall and the first electrode.

4. The method of claim 3 , wherein a portion of the second electrode extends beyond the wall of the cavity.

5. The method of claim 3 , wherein the diaphragm includes a third electrode, the third electrode being disposed between the piezoelectric layer and the cavity.

6. The method of claim 5 , wherein the third electrode is configured as a reference electrode in common with each of the first electrode and the second electrode.

7. The method of claim 6 , wherein a voltage of the reference electrode is clamped to ground or other reference voltage.

8. The method of claim 1 , wherein:
the diaphragm is supported by an anchor structure and extends over the cavity, the diaphragm being configured to undergo one or both of flexural motion and vibration and operate in a first flexural mode when the PMUT receives or transmits ultrasonic signals.

9. The method of claim 8 , wherein, in the first flexural mode, each of the first and second electrodes experience a respective first and second oscillating load cycle that includes alternating periods of tensile and compressive stress.

10. The method of claim 9 , wherein the first and second oscillating load cycles are approximately in phase.

11. The method of claim 9 , wherein the first and second oscillating load cycles are out of phase.

12. The method of claim 11 , wherein the first and second oscillating load cycles are 180° out of phase.

13. The method of claim 1 , wherein the second electrode is configured to be in a transmit mode during the first time period and in a receive mode during the second time period.

14. An apparatus comprising:
a piezoelectric micromechanical ultrasonic transducer (PMUT), the PMUT including:
a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry, wherein:
the first electrode is disposed in a first portion of the diaphragm, and the second electrode is disposed in a second portion of the diaphragm, the first portion being separated from the first portion;
each of the first electrode and the second electrode is disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity; and
the PMUT is configured to transmit first ultrasonic signals by way of the first electrode during a first time period and to receive second ultrasonic signals by way of the second electrode during a second time period, the first time period and the second time period being at least partially overlapping.

15. The apparatus of claim 14 , wherein the second electrode is disposed proximal to a wall of the cavity and between the wall and the first electrode.

16. The apparatus of claim 15 , wherein a portion of the second electrode extends beyond the wall of the cavity.

17. The apparatus of claim 14 , wherein the PMUT is configured to simultaneously transmit first ultrasonic signals by way of the first electrode and to receive second ultrasonic signals by way of the second electrode.

18. The apparatus of claim 14 , wherein the diaphragm includes a third electrode, the third electrode being disposed between the piezoelectric layer and the cavity.

19. The apparatus of claim 18 , wherein the first electrode is a transmit electrode, the second electrode is a receive electrode and the third electrode is configured as a reference electrode in common with each of the transmit electrode and the receive electrode.

20. The apparatus of claim 14 , wherein the diaphragm includes a mechanical layer, the mechanical layer being positioned between the piezoelectric layer stack and the cavity or positioned on a side of the piezoelectric layer stack opposite the cavity.

21. The apparatus of claim 14 , further comprising an anchor structure disposed over a substrate, wherein the diaphragm is supported by the anchor structure and extends over the cavity, the diaphragm being configured to undergo one or both of flexural motion and vibration when the PMUT receives or transmits ultrasonic signals.

22. The apparatus of claim 21 , wherein the diaphragm is configured as an elongated rectangle having a longitudinal dimension of length L and a width of W, L being at least two times W.

23. The apparatus of claim 22 , wherein the anchor structure supports the diaphragm at a first discrete location that is proximal to a proximal end of the longitudinal dimension and at a second discrete location of the diaphragm that is proximal to a distal end of the longitudinal dimension.

24. The apparatus of claim 22 , wherein the anchor structure supports the diaphragm in a central portion of the diaphragm.

25. The apparatus of claim 22 , wherein the anchor structure supports the diaphragm in a peripheral region of the diaphragm.

26. The apparatus of claim 21 , wherein the diaphragm is substantially circular.

27. The apparatus of claim 26 , wherein the anchor structure supports the diaphragm in a central portion of the diaphragm.

28. The apparatus of claim 14 , wherein the cavity is formed by removing a sacrificial material through at least one release hole.

29. The apparatus of claim 28 , wherein the release hole is disposed through the diaphragm.

30. The apparatus of claim 14 , wherein the first electrode and the second electrode are approximately coplanar.

31. An apparatus comprising:
an array of piezoelectric micromechanical ultrasonic transducer (PMUT) sensors; and
an acoustic coupling medium, wherein:
at least one PMUT includes a diaphragm disposed over a cavity, the diaphragm including a piezoelectric layer stack including a piezoelectric layer, a first electrode electrically coupled with a transceiver circuitry, and a second electrode electrically coupled with the transceiver circuitry;
the first electrode is disposed in a first porti

Assignees

• Qualcomm Inc

Inventors

• Panchawagh Hrishikesh Vijaykumar
• Tang Hao-Yen
• Lu Yipeng
• Djordjev Kostadin Dimitrov
• Ganti Suryaprakash
• Burns David William
• Shenoy Ravindra Vaman
• Lasiter Jon Bradley
• Kuo Nai-Kuei
• Sammoura Firas

Classifications

• B06B1/0207 Primary

  Driving circuits (specially adapted for particular applications, see the relevant subclass, e.g. G01; circuits for steering transducer arrays G10K11/34; basic circuits H03) · CPC title

• B06B1/0607 Primary

  using multiple elements (B06B1/064 and B06B1/0688 take precedence) · CPC title

• G01S15/04

  Systems determining presence of a target · CPC title

• G01S15/8915

  using a transducer array · CPC title

• G06F3/0436

  in which generating transducers and detecting transducers are attached to a single acoustic waves transmission substrate · CPC title