Apparatus for monitoring a plasma process
US-12562357-B2 · Feb 24, 2026 · US
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Yoo Hosun patents
Yoo Hosun is listed as an inventor on 11 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yoo Hosun |
| Total patents | 11 |
| First publication | Mar 3, 2022 |
| Latest publication | Feb 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Plasma treatment apparatus, a method of monitoring a process of manufacturing a semiconductor device by using the same, and a method of manufacturing a semiconductor device including the monitoring method
US-12170233-B2 · Dec 17, 2024 · US
Fastening automation apparatus for upper electrode
US-12119210-B2 · Oct 15, 2024 · US
Plasma processing apparatus and plasma processing method
US-12020909-B2 · Jun 25, 2024 · US
Apparatus for monitoring a plasma process
US-2023317439-A1 · Oct 5, 2023 · US
Apparatus for generating extreme ultraviolet light and lithography apparatus including the same
US-11720027-B2 · Aug 8, 2023 · US
Plasma processing apparatus and plasma processing method
US-2023230815-A1 · Jul 20, 2023 · US
Plasma processing apparatus and plasma processing method
US-11646179-B2 · May 9, 2023 · US
Plasma processing apparatus and plasma processing method
US-2022093369-A1 · Mar 24, 2022 · US
Apparatus for generating extreme ultraviolet light and lithography apparatus including the same
US-2022082946-A1 · Mar 17, 2022 · US
Recent patents
Latest publications not already listed above.
Fastening automation apparatus for upper electrode
US-2022068609-A1 · Mar 3, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 11 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32642 | 8 |
| H01J37/32091 | 6 |
| H01J37/3244 | 5 |
| H01J37/32715 | 5 |
| H01J37/32119 | 5 |