Glass substrate for EUVL, manufacturing method thereof, mask blank for EUVL, and manufacturing method thereof
US-12209046-B2 · Jan 28, 2025 · US
Yamana Satoshi is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Yamana Satoshi |
| Total patents | 2 |
| First publication | Nov 18, 2021 |
| Latest publication | Jan 28, 2025 |
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Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Agc Inc | 2 |
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/52 | 2 |
| C03C2201/42 | 2 |
| C03C2201/12 | 2 |
| G03F1/54 | 2 |
| C03C2204/08 | 2 |