Method and apparatus for determining lithographic quality of a structure
US-9518936-B2 · Dec 13, 2016 · US
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Xu Lu patents
Xu Lu is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Xu Lu |
| Total patents | 2 |
| First publication | Oct 29, 2015 |
| Latest publication | Dec 13, 2016 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 2 |
| Asml Nertherlands B V | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70641 | 2 |
| G03F7/70625 | 2 |
| G03F7/70558 | 2 |
| G01N21/95607 | 2 |
| G01N2021/4792 | 2 |