Tunability of edge plasma density for tilt control
US-12505991-B2 · Dec 23, 2025 · US
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Wu Dongjun patents
Wu Dongjun is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wu Dongjun |
| Total patents | 2 |
| First publication | Mar 2, 2023 |
| Latest publication | Dec 23, 2025 |
Notable patents
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Tunability of edge plasma density for tilt control
US-2023063007-A1 · Mar 2, 2023 · US
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32477 | 2 |
| H01J37/32651 | 2 |
| H01J37/32715 | 2 |
| H01J37/32532 | 2 |
| H01J37/32467 | 2 |