Calibration of parametric measurement models based on in-line wafer measurement data
US-12546727-B2 · Feb 10, 2026 · US
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Wu David patents
Wu David is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wu David |
| Total patents | 2 |
| First publication | Mar 28, 2024 |
| Latest publication | Feb 10, 2026 |
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Major assignees
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| Assignee | Patents |
|---|---|
| Kla Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01N2201/127 | 2 |
| G01N2021/213 | 2 |
| G03F7/706839 | 2 |
| G01B11/02 | 2 |
| G01N21/4738 | 2 |