Metrology system calibration refinement
US-10605722-B2 · Mar 31, 2020 · US
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Wei Lanhua patents
Wei Lanhua is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wei Lanhua |
| Total patents | 4 |
| First publication | Oct 18, 2016 |
| Latest publication | Mar 31, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Metrology system calibration refinement
US-2018100796-A1 · Apr 12, 2018 · US
Metrology system calibration refinement
US-9857291-B2 · Jan 2, 2018 · US
Optical metrology with reduced sensitivity to grating anomalies
US-9470639-B1 · Oct 18, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01B2210/56 | 4 |
| G01N2021/213 | 4 |
| G01N21/211 | 4 |
| G01N21/9501 | 4 |
| G01N21/274 | 3 |