Purging Deposition Tools to Reduce Oxygen and Moisture in Wafers
US-2018061959-A1 · Mar 1, 2018 · US
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Wang Yu Sheng patents
Wang Yu Sheng is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wang Yu Sheng |
| Total patents | 1 |
| First publication | Mar 1, 2018 |
| Latest publication | Mar 1, 2018 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P95/90 | 1 |
| H10P72/7621 | 1 |
| H10P72/1924 | 1 |
| H10P72/0468 | 1 |
| H10P72/0454 | 1 |