EUV light source using cryogenic droplet targets in mask inspection
US-9295147-B2 · Mar 22, 2016 · US
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Wack Daniel Christopher patents
Wack Daniel Christopher is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wack Daniel Christopher |
| Total patents | 1 |
| First publication | Mar 22, 2016 |
| Latest publication | Mar 22, 2016 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P76/00 | 1 |
| G03F1/22 | 1 |
| G03F1/84 | 1 |
| G03F7/70033 | 1 |
| G03F7/20 | 1 |