Localized purge module for substrate handling
US-11315816-B2 · Apr 26, 2022 · US
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Volkov Igor patents
Volkov Igor is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Volkov Igor |
| Total patents | 4 |
| First publication | Sep 1, 2016 |
| Latest publication | Apr 26, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Localized Purge Module for Substrate Handling
US-2021391200-A1 · Dec 16, 2021 · US
End effectors and reticle handling at a high throughput
US-9618857-B2 · Apr 11, 2017 · US
End effectors and reticle handling at a high throughput
US-2016252826-A1 · Sep 1, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Corp | 2 |
| Kla Tencor Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| B25J15/0014 | 4 |
| H10P72/7602 | 2 |
| H10P72/3402 | 2 |
| H10P72/1926 | 2 |
| H10P72/0402 | 2 |