Position measurement system, interferometer system and lithographic apparatus
US-11619886-B2 · Apr 4, 2023 · US
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Voβ Thomas patents
Voβ Thomas is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Voβ Thomas |
| Total patents | 1 |
| First publication | Apr 4, 2023 |
| Latest publication | Apr 4, 2023 |
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Major assignees
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| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70775 | 1 |
| G01B11/002 | 1 |
| G01B9/02015 | 1 |
| G03F7/70716 | 1 |