System, control method and apparatus for chemical mechanical polishing
US-10792783-B2 · Oct 6, 2020 · US
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Tseng Yu-Chin patents
Tseng Yu-Chin is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tseng Yu-Chin |
| Total patents | 2 |
| First publication | May 30, 2019 |
| Latest publication | Oct 6, 2020 |
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Major assignees
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| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 2 |
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