System and method for automatic gas optimization in a two-chamber gas discharge laser system
US-9831628-B2 · Nov 28, 2017 · US
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Thornes Joshua patents
Thornes Joshua is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Thornes Joshua |
| Total patents | 5 |
| First publication | Sep 8, 2015 |
| Latest publication | Nov 28, 2017 |
Notable patents
Publications ranked by popularity score, then publication date.
Metrology system and method having a plurality of sensors for estimating a spectral feature of a pulsed light beam
US-9778108-B2 · Oct 3, 2017 · US
System and method for automatic gas optimization in a two-chamber gas discharge laser system
US-2017279240-A1 · Sep 28, 2017 · US
Spectral Feature Metrology of a Pulsed Light Beam
US-2016341602-A1 · Nov 24, 2016 · US
System and method for automatic gas optimization in a two-chamber gas discharge laser system
US-9130337-B1 · Sep 8, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Cymer LLC | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01S3/0014 | 3 |
| H01S3/036 | 3 |
| H01S3/104 | 3 |
| H01S3/22 | 3 |
| H01S3/225 | 3 |