Residual gas analyser, projection exposure apparatus comprising a residual gas analyser and method of residual gas analysis
US-2025174452-A1 · May 29, 2025 · US
Thinius Marco is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Thinius Marco |
| Total patents | 4 |
| First publication | Jul 21, 2022 |
| Latest publication | May 29, 2025 |
Publications ranked by popularity score, then publication date.
US-2025174452-A1 · May 29, 2025 · US
US-2025166983-A1 · May 22, 2025 · US
US-12176199-B2 · Dec 24, 2024 · US
US-2022230865-A1 · Jul 21, 2022 · US
Latest publications not already listed above.
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Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Leybold Gmbh | 2 |
| Zeiss Carl Smt Gmbh | 2 |
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J49/068 | 3 |
| H01J49/147 | 2 |
| H01J49/26 | 2 |
| H01J49/025 | 2 |
| H01J49/24 | 2 |