Substrate transfer robot and automatic teaching method
US-10953539-B2 · Mar 23, 2021 · US
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Tang mark patents
Tang mark is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Tang mark |
| Total patents | 7 |
| First publication | Mar 2, 2017 |
| Latest publication | Mar 23, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate transfer robot and method of teaching edge position of target body
US-10867821-B2 · Dec 15, 2020 · US
Substrate transfer robot and automatic teaching method
US-2020206917-A1 · Jul 2, 2020 · US
Substrate transfer robot and method of teaching edge position of target body
US-2020083073-A1 · Mar 12, 2020 · US
Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction
US-10381257-B2 · Aug 13, 2019 · US
Substrate holding hand and substrate conveying apparatus including the same
US-2019013215-A1 · Jan 10, 2019 · US
Substrate conveying robot and substrate processing system
US-2017062264-A1 · Mar 2, 2017 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kawasaki Heavy Ind Ltd | 7 |
| Kawasaki Robotics Usa Inc | 6 |
| Kawasaki Robotics (Usa) Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7602 | 7 |
| H01L21/68707 | 7 |
| H10P72/3402 | 5 |
| H10P72/0606 | 4 |
| H10P72/53 | 4 |