Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus
US-2018127868-A1 · May 10, 2018 · US
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Stevenson Tom patents
Stevenson Tom is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Stevenson Tom |
| Total patents | 10 |
| First publication | Mar 10, 2015 |
| Latest publication | May 10, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Showerhead electrode assemblies for plasma processing apparatuses
US-9899228-B2 · Feb 20, 2018 · US
Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus
US-9873940-B2 · Jan 23, 2018 · US
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
US-9546432-B2 · Jan 17, 2017 · US
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
US-2015337450-A1 · Nov 26, 2015 · US
Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
US-9123651-B2 · Sep 1, 2015 · US
Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus
US-2015184296-A1 · Jul 2, 2015 · US
Component of a plasma processing apparatus including an electrically conductive and nonmagnetic cold sprayed coating
US-2015187615-A1 · Jul 2, 2015 · US
Film adhesive for semiconductor vacuum processing apparatus
US-9028646-B2 · May 12, 2015 · US
Pressure controlled heat pipe temperature control plate
US-8975817-B2 · Mar 10, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 10 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/4404 | 7 |
| H10P72/0421 | 5 |
| H10P50/242 | 5 |
| H01L21/67069 | 5 |
| Y10T428/31504 | 4 |