Illumination system for a microlithographic projection exposure apparatus
US-9575414-B2 · Feb 21, 2017 · US
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Spengler Uwe patents
Spengler Uwe is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Spengler Uwe |
| Total patents | 3 |
| First publication | Dec 22, 2015 |
| Latest publication | Feb 21, 2017 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70058 | 3 |
| G03F7/70191 | 3 |
| G03F7/70083 | 3 |
| G03F7/70075 | 3 |
| G02B3/0056 | 3 |