System to detect wafer arcing in semiconductor manufacturing equipment
US-10283421-B2 · May 7, 2019 · US
Singlevich Scott is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Singlevich Scott |
| Total patents | 3 |
| First publication | Nov 29, 2016 |
| Latest publication | May 7, 2019 |
Publications ranked by popularity score, then publication date.
US-10283421-B2 · May 7, 2019 · US
US-2017077002-A1 · Mar 16, 2017 · US
US-9508612-B2 · Nov 29, 2016 · US
Latest publications not already listed above.
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Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 3 |
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/207 | 3 |
| H10P74/23 | 3 |
| H10P72/0604 | 3 |
| G01R31/08 | 3 |
| H01J37/32541 | 3 |