Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method
US-11789373-B2 · Oct 17, 2023 · US
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Singh Aditya patents
Singh Aditya is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Singh Aditya |
| Total patents | 2 |
| First publication | Jun 23, 2022 |
| Latest publication | Oct 17, 2023 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H02N2/062 | 2 |
| G03F7/70266 | 2 |
| G03F7/70758 | 2 |
| G02B27/0068 | 2 |
| G03F7/70775 | 2 |