Actuator-sensor device and lithography apparatus
US-2024027914-A1 · Jan 25, 2024 · US
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Seitz Stefan patents
Seitz Stefan is listed as an inventor on 23 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Seitz Stefan |
| Total patents | 23 |
| First publication | Apr 21, 2016 |
| Latest publication | Jan 25, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Facet mirror for an illumination optical unit of a projection exposure apparatus
US-11789367-B2 · Oct 17, 2023 · US
Facet mirror for an illumination optical unit of a projection exposure apparatus
US-2022206398-A1 · Jun 30, 2022 · US
Polygon scanner and method of detecting objects in a monitored zone
US-11353560-B2 · Jun 7, 2022 · US
Method of pump operation, use of the method in HPLC, pump, pump system, and HPLC system
US-10767643-B2 · Sep 8, 2020 · US
Sensor and method of heating a sensor
US-10719108-B2 · Jul 21, 2020 · US
Light receiver and method for reading out avalanche photodiodes in Geiger mode
US-10612972-B2 · Apr 7, 2020 · US
Light receiver having a plurality of avalanche photodiode elements and method for supplying a bias voltage
US-10584998-B2 · Mar 10, 2020 · US
Light receiver having geiger-mode avalanche photodiodes and method for reading out
US-10436638-B2 · Oct 8, 2019 · US
Illumination optic for EUV projection lithography
US-10379444-B2 · Aug 13, 2019 · US
Recent patents
Latest publications not already listed above.
Polygon scanner and method of detecting objects in a monitored zone
US-2019154807-A1 · May 23, 2019 · US
Method of pump operation, use of the method in hplc, pump, pump system, and hplc system
US-2019010940-A1 · Jan 10, 2019 · US
Geiger mode APD light receiver having an active readout forming a virtual short-circuit
US-10018505-B2 · Jul 10, 2018 · US
Light Receiver Having a Plurality of Avalanche Photodiode Elements in Geiger Mode and Method for Temperature Compensation
US-2018180471-A1 · Jun 28, 2018 · US
Light receiver having a plurality of avalanche photodiode elements and method for detecting light
US-2018180470-A1 · Jun 28, 2018 · US
Light Receiver Having a Plurality of Avalanche Photodiode Elements and Method for Supplying a Bias Voltage
US-2018180473-A1 · Jun 28, 2018 · US
Light receiver and method for reading out avalanche photodiodes in geiger mode
US-2018180472-A1 · Jun 28, 2018 · US
Illumination optic for euv projection lithography
US-2018074410-A1 · Mar 15, 2018 · US
Electromechanical braking device for a braking system and braking system for a vehicle
US-9889836-B2 · Feb 13, 2018 · US
Light receiver having geiger-mode avalanche photodiodes and method for reading out
US-2017363467-A1 · Dec 21, 2017 · US
Sensor and method of heating a sensor
US-2017248997-A1 · Aug 31, 2017 · US
Light Receiver with Avalanche Photo Diodes in a Geiger Mode
US-2017030769-A1 · Feb 2, 2017 · US
Electromechanical braking device for a braking system and braking system for a vehicle
US-2016107628-A1 · Apr 21, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Sick Ag | 14 |
| Zeiss Carl Smt Gmbh | 5 |
| Bosch Gmbh Robert | 2 |
| Dionex Softron Gmbh | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01J2001/4466 | 10 |
| G01J1/44 | 10 |
| G01S7/4863 | 8 |
| G01J1/46 | 8 |
| G01J2001/448 | 6 |