Variable radius mirror dichroic beam splitter module for extreme ultraviolet source
US-9516729-B2 · Dec 6, 2016 · US
This page is not indexed by search engines while we improve data quality.
Rafac Robert J patents
Rafac Robert J is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Rafac Robert J |
| Total patents | 17 |
| First publication | Jan 6, 2015 |
| Latest publication | Dec 6, 2016 |
Notable patents
Publications ranked by popularity score, then publication date.
Variable Radius Mirror Dichroic Beam Splitter Module for Extreme Ultraviolet Source
US-2016174351-A1 · Jun 16, 2016 · US
Regenerative ring resonator
US-RE45957-E · Mar 29, 2016 · US
Calibration of photoelectromagnetic sensor in a laser source
US-9239269-B1 · Jan 19, 2016 · US
Calibration of photoelectromagnetic sensor in a laser source
US-9239268-B1 · Jan 19, 2016 · US
Calibration of photoelectromagnetic sensor in a laser source
US-2016011056-A1 · Jan 14, 2016 · US
Calibration of photoelectromagnetic sensor in a laser source
US-2016011057-A1 · Jan 14, 2016 · US
Extreme ultraviolet light source
US-9232623-B2 · Jan 5, 2016 · US
Target for laser produced plasma extreme ultraviolet light source
US-9232624-B2 · Jan 5, 2016 · US
Target for laser produced plasma extreme ultraviolet light source
US-2015342016-A1 · Nov 26, 2015 · US
Recent patents
Latest publications not already listed above.
Target for extreme ultraviolet light source
US-9155179-B2 · Oct 6, 2015 · US
Target for laser produced plasma extreme ultraviolet light source
US-9107279-B2 · Aug 11, 2015 · US
Extreme ultraviolet light source
US-2015208494-A1 · Jul 23, 2015 · US
Target for laser produced plasma extreme ultraviolet light source
US-2015189729-A1 · Jul 2, 2015 · US
System and method for adjusting seed laser pulse width to control EUV output energy
US-9000403-B2 · Apr 7, 2015 · US
Target for extreme ultraviolet light source
US-2015076374-A1 · Mar 19, 2015 · US
Target for laser produced plasma extreme ultraviolet light source
US-8927952-B2 · Jan 6, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 16 |
| Cymer LLC | 1 |
| Cymer LLC | 1 |
| Cymer Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H05G2/008 | 15 |
| H05G2/0088 | 9 |
| G03F7/70033 | 8 |
| H05G2/0086 | 7 |
| H05G2/005 | 6 |