Euv collector for an euv projection exposure apparatus
US-2025126698-A1 · Apr 17, 2025 · US
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Purvis Michael patents
Purvis Michael is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Purvis Michael |
| Total patents | 1 |
| First publication | Apr 17, 2025 |
| Latest publication | Apr 17, 2025 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70233 | 1 |
| G03F7/702 | 1 |
| G03F7/7015 | 1 |
| G03F7/70033 | 1 |
| G02B19/0095 | 1 |