Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing
US-9847221-B1 · Dec 19, 2017 · US
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Pharkya Amit patents
Pharkya Amit is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Pharkya Amit |
| Total patents | 2 |
| First publication | Mar 21, 2017 |
| Latest publication | Dec 19, 2017 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6532 | 2 |
| H10P72/0421 | 1 |
| B08B7/00 | 1 |
| C23C16/4405 | 1 |
| H01J37/32862 | 1 |