Method for producing an illumination system for an EUV projection exposure system, and illumination system
US-11048172-B2 · Jun 29, 2021 · US
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Orthen André patents
Orthen André is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Orthen André |
| Total patents | 4 |
| First publication | Dec 27, 2018 |
| Latest publication | Jun 29, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Method for producing an illumination system for an euv projection exposure system, and illumination system
US-2020110340-A1 · Apr 9, 2020 · US
Method for producing an illumination system for an EUV projection exposure system, and illumination system
US-10514608-B2 · Dec 24, 2019 · US
Method for producing an illumination system for an euv projection exposure system, and illumination system
US-2018373158-A1 · Dec 27, 2018 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70075 | 4 |
| G03F7/70141 | 4 |
| G03F7/70033 | 4 |
| G03F7/7085 | 4 |
| G03F7/702 | 4 |