Mask blank, phase shift mask, and production method thereof
US-9971238-B2 · May 15, 2018 · US
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Ohkawa Youhei patents
Ohkawa Youhei is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ohkawa Youhei |
| Total patents | 4 |
| First publication | Jul 7, 2016 |
| Latest publication | May 15, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Mask blank, mask blank with negative resist film, phase shift mask, and method for producing pattern formed body using same
US-9874808-B2 · Jan 23, 2018 · US
Mask blank, phase shift mask, and production method thereof
US-2017123305-A1 · May 4, 2017 · US
Mask blank, mask blank with negative resist film, phase shift mask, and method for producing pattern formed body using same
US-2016195803-A1 · Jul 7, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Dainippon Printing Co Ltd | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/32 | 4 |
| G03F7/32 | 2 |
| G03F1/26 | 2 |
| G03F1/20 | 2 |
| H10P76/4085 | 2 |