Systems and methods for forming UV-cured low-κ dielectric films
US-11621162-B2 · Apr 4, 2023 · US
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Ngo Sure patents
Ngo Sure is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ngo Sure |
| Total patents | 9 |
| First publication | Oct 20, 2015 |
| Latest publication | Apr 4, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Systems and methods for forming uv-cured low-k dielectric films
US-2022108884-A1 · Apr 7, 2022 · US
Systems and methods for depositing low-k dielectric films
US-2022084815-A1 · Mar 17, 2022 · US
Systems and methods for cleaning low-k deposition chambers
US-2022081765-A1 · Mar 17, 2022 · US
Multi-layer dielectric stack for plasma damage protection
US-9391024-B2 · Jul 12, 2016 · US
Post treatment for dielectric constant reduction with pore generation on low K dielectric films
US-9324571-B2 · Apr 26, 2016 · US
Multi-layer dielectric stack for plasma damage protection
US-2016111373-A1 · Apr 21, 2016 · US
Post treatment for dielectric constant reduction with pore generation on low k dielectric films
US-2015380265-A1 · Dec 31, 2015 · US
Adhesion layer to minimize dielectric constant increase with good adhesion strength in a PECVD process
US-9165998-B2 · Oct 20, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 9 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6922 | 9 |
| H10P14/6336 | 9 |
| H01L21/02274 | 9 |
| H10P14/665 | 7 |
| H01L21/02126 | 7 |