Systems and methods for ex-situ bakeout of differentially pumped vacuum chambers
US-12594619-B2 · Apr 7, 2026 · US
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Muray Lawrence patents
Muray Lawrence is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Muray Lawrence |
| Total patents | 14 |
| First publication | Oct 8, 2019 |
| Latest publication | Apr 7, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
High-voltage column with permanent magnet lens and positive wafer bias for overlay
US-2025385066-A1 · Dec 18, 2025 · US
Systems and methods for ex-situ bakeout of differentially pumped vacuum chambers
US-2025339918-A1 · Nov 6, 2025 · US
Ultra-high sensitivity hybrid inspection with full wafer coverage capability
US-2025316437-A1 · Oct 9, 2025 · US
Auto-focus sensor implementation for multi-column microscopes
US-12322568-B2 · Jun 3, 2025 · US
Ensemble of deep learning models for defect review in high volume manufacturing
US-12211196-B2 · Jan 28, 2025 · US
Ensemble of deep learning models for defect review in high volume manufacturing
US-2024354925-A1 · Oct 24, 2024 · US
Auto-focus sensor implementation for multi-column microscopes
US-2024079203-A1 · Mar 7, 2024 · US
Miniature hybrid electron beam column
US-2023326704-A1 · Oct 12, 2023 · US
Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electrons
US-11699607-B2 · Jul 11, 2023 · US
Recent patents
Latest publications not already listed above.
Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electrons
US-2022399220-A1 · Dec 15, 2022 · US
Defect inspection and review using transmissive current image of charged particle beam system
US-11410830-B1 · Aug 9, 2022 · US
Ultra-high sensitivity hybrid inspection with full wafer coverage capability
US-10545099-B1 · Jan 28, 2020 · US
Array-based characterization tool
US-10438769-B1 · Oct 8, 2019 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Corp | 12 |
| Kla Tencor Corp | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/244 | 8 |
| H01J37/28 | 6 |
| H01J37/20 | 5 |
| H01J37/26 | 3 |
| H01J2237/2817 | 3 |