Multi charged particle beam writing method and multi charged particle beam writing apparatus
US-12592360-B2 · Mar 31, 2026 · US
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Morita Hirofumi patents
Morita Hirofumi is listed as an inventor on 69 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Morita Hirofumi |
| Total patents | 69 |
| First publication | Jan 8, 2015 |
| Latest publication | Mar 31, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Multi-charged particle beam writing apparatus
US-2026081106-A1 · Mar 19, 2026 · US
Multi charged particle beam writing apparatus
US-12580148-B2 · Mar 17, 2026 · US
Transport System and Automatic Teaching Method
US-2026070213-A1 · Mar 12, 2026 · US
Charged particle beam irradiation apparatus and charged particle beam irradiation method
US-2025379021-A1 · Dec 11, 2025 · US
Multi charged particle beam irradiation apparatus and adjusting method thereof
US-2025323010-A1 · Oct 16, 2025 · US
Optical system adjustment method for multi charged particle beam apparatus and computer readable recording medium
US-12406828-B2 · Sep 2, 2025 · US
Blanking aperture array mechanism and writing apparatus
US-2024395493-A1 · Nov 28, 2024 · US
Multi charged particle beam writing apparatus
US-2024242922-A1 · Jul 18, 2024 · US
Multi charged particle beam writing apparatus
US-2024242920-A1 · Jul 18, 2024 · US
Recent patents
Latest publications not already listed above.
Multi charged particle beam writing apparatus
US-2024242933-A1 · Jul 18, 2024 · US
Multi charged particle beam writing apparatus
US-2024242919-A1 · Jul 18, 2024 · US
Charged particle beam writing apparatus
US-12009175-B2 · Jun 11, 2024 · US
Electron beam writing apparatus and electron beam writing method
US-2024087845-A1 · Mar 14, 2024 · US
Multi charged particle beam writing apparatus
US-11908659-B2 · Feb 20, 2024 · US
Mounting substrate, blanking aperture array chip, blanking aperture array system and multi charged particle beam irradiation apparatus
US-2024013999-A1 · Jan 11, 2024 · US
Multi charged particle beam evaluation method, multi charged particle beam writing method, inspection method for aperture array substrate for multi charged particle beam irradiation apparatus, and computer-readable recording medium
US-2023402253-A1 · Dec 14, 2023 · US
Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus
US-11804360-B2 · Oct 31, 2023 · US
Hydrogen-energy control system and control method for hydrogen-energy control system
US-11784335-B2 · Oct 10, 2023 · US
Charged particle beam writing apparatus and charged particle beam writing method
US-11756766-B2 · Sep 12, 2023 · US
Optical system adjustment method for multi charged particle beam apparatus and computer readable recording medium
US-2023260749-A1 · Aug 17, 2023 · US
Semiconductor device, multi-charged-particle beam writing apparatus, and multi-charged-particle beam exposure apparatus
US-11721520-B2 · Aug 8, 2023 · US
Controller, controlling method, and record medium
US-11710839-B2 · Jul 25, 2023 · US
Foamable polyurethane resin composition and foamed polyurethane elastomer
US-2023082765-A1 · Mar 16, 2023 · US
Multi charged particle beam writing method and multi charged particle beam writing apparatus
US-2023055778-A1 · Feb 23, 2023 · US
Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus
US-2023005711-A1 · Jan 5, 2023 · US
Multi charged particle beam writing apparatus
US-2022399181-A1 · Dec 15, 2022 · US
Structural polyurethane adhesive
US-2022356385-A1 · Nov 10, 2022 · US
Charged particle beam writing apparatus
US-2022328278-A1 · Oct 13, 2022 · US
Charged particle beam writing apparatus and charged particle beam writing method
US-2022319807-A1 · Oct 6, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Nuflare Technology Inc | 49 |
| Toshiba Kk | 10 |
| Mitsui Chemicals Inc | 5 |
| Toshiba Energy Systems & Solutions Corp | 4 |
| Morita Hirofumi | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/3177 | 45 |
| H01J37/045 | 38 |
| H01J2237/0435 | 22 |
| H01J2237/0437 | 18 |
| G03F7/2059 | 15 |