Semiconductor processing chamber thermal control
US-2025349575-A1 · Nov 13, 2025 · US
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Mor Eli patents
Mor Eli is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mor Eli |
| Total patents | 15 |
| First publication | Mar 5, 2020 |
| Latest publication | Nov 13, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Autonomous substrate processing system
US-12265377-B2 · Apr 1, 2025 · US
Method and apparatus for measuring erosion and calibrating position for a moving process kit
US-11978647-B2 · May 7, 2024 · US
Autonomous substrate processing system
US-2023305531-A1 · Sep 28, 2023 · US
Autonomous substrate processing system
US-11709477-B2 · Jul 25, 2023 · US
Method and apparatus for measuring erosion and calibrating position for a moving process kit
US-2023052210-A1 · Feb 16, 2023 · US
Method and apparatus for measuring erosion and calibrating position for a moving process kit
US-11521872-B2 · Dec 6, 2022 · US
Method and apparatus for measuring process kit centering
US-11387122-B2 · Jul 12, 2022 · US
Autonomous substrate processing system
US-2022214662-A1 · Jul 7, 2022 · US
Method and apparatus for measuring process kit centering
US-2021035832-A1 · Feb 4, 2021 · US
Recent patents
Latest publications not already listed above.
Method and apparatus for measuring process kit centering
US-10847393-B2 · Nov 24, 2020 · US
Long range capacitive gap measurement in a wafer form sensor system
US-10794681-B2 · Oct 6, 2020 · US
Method and apparatus for measuring process kit centering
US-2020075368-A1 · Mar 5, 2020 · US
Method and apparatus for measuring erosion and calibrating position for a moving process kit
US-2020075367-A1 · Mar 5, 2020 · US
Long range capacitive gap measurement in a wafer form sensor system
US-2020072594-A1 · Mar 5, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 15 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01B7/14 | 10 |
| H10P72/06 | 10 |
| H10P72/72 | 9 |
| H10P72/0604 | 8 |
| H10P72/0606 | 8 |