System and method for lateral shearing interferometry in an inspection tool
US-11609506-B2 · Mar 21, 2023 · US
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Mengel Markus patents
Mengel Markus is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mengel Markus |
| Total patents | 2 |
| First publication | Oct 27, 2022 |
| Latest publication | Mar 21, 2023 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/84 | 2 |
| G03F7/70033 | 2 |
| G03F9/7049 | 2 |
| G01B9/02098 | 2 |
| G03F7/7065 | 2 |